Shear mode coupling and properties dispersion in 8GHz range AlN thin film bulk acoustic wave (BAW) resonator

2006 ◽  
Vol 514 (1-2) ◽  
pp. 341-343 ◽  
Author(s):  
F. Martin ◽  
M.-E. Jan ◽  
B. Belgacem ◽  
M.-A. Dubois ◽  
P. Muralt
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Mode Coupling ◽  
Bulk Acoustic Wave ◽  
Shear Mode ◽  
Film Bulk

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

AIP Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 075002
Author(s):  
Xiaoyuan Bai ◽  
Yao Shuai ◽  
Lu Lv ◽  
Ying Xing ◽  
Jiaoling Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Single Crystalline ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Simulation and fabrication of thin film bulk acoustic wave resonator

2016 ◽  
Vol 37 (7) ◽  
pp. 074009
Author(s):  
Xixi Han ◽  
Yi Ou ◽  
Zhigang Li ◽  
Wen Ou ◽  
Dapeng Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Thin film bulk acoustic wave filter

2002 ◽  
Vol 49 (4) ◽  
pp. 535-539 ◽  
Author(s):  
M. Ylilammi ◽  
J. Ella ◽  
M. Partanen ◽  
J. Kaitila
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Film Bulk ◽  
Wave Filter

Thin film bulk acoustic wave filters with ring-dot electrodes

2018 ◽  
Vol 19 (10) ◽  
pp. 786-795 ◽  
Author(s):  
Jing Liu ◽  
Jian-ke Du ◽  
Ji Wang ◽  
Jia-shi Yang
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Film Bulk ◽  
Wave Filters

Thin film bulk acoustic wave resonator (TFBAR) gas sensor

2005 ◽  
Author(s):  
M. Benetti ◽  
D. Cannat ◽  
A. D'Amico ◽  
F. Di Pietrantonio ◽  
V. Foglietti ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Gas Sensor ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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