Spectroscopic study using FTIR, Raman, XPS and NEXAFS of carbon nitride thin films deposited by RF magnetron sputtering

2005 ◽  
Vol 482 (1-2) ◽  
pp. 167-171 ◽  
Author(s):  
B. Bouchet-Fabre ◽  
E. Marino ◽  
G. Lazar ◽  
K. Zellama ◽  
M. Clin ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Spectroscopic Study ◽  
Carbon Nitride ◽  
Rf Magnetron Sputtering

Effect of target self-bias on carbon nitride thin films deposited by RF magnetron sputtering

2001 ◽  
Vol 118 (4) ◽  
pp. 179-182 ◽  
Author(s):  
O. Durand-Drouhin ◽  
M. Lejeune ◽  
M. Clin ◽  
D. Ballutaud ◽  
M. Benlahsen
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Rf Magnetron Sputtering ◽  
Self Bias

Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering

2019 ◽  
Vol 492 ◽  
pp. 99-107 ◽  
Author(s):  
T. Lertvanithphol ◽  
W. Rakreungdet ◽  
C. Chananonnawathorn ◽  
P. Eiamchai ◽  
S. Limwichean ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Spectroscopic Study ◽  
Rf Magnetron Sputtering ◽  
Reactive Gas

Influence of RF power on the electrical and mechanical properties of nano-structured carbon nitride thin films deposited by RF magnetron sputtering

2010 ◽  
Vol 518 (24) ◽  
pp. 7240-7244 ◽  
Author(s):  
I. Banerjee ◽  
Neelam Kumari ◽  
Ashis K. Singh ◽  
Mukesh Kumar ◽  
Pinaki Laha ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Carbon Nitride ◽  
Rf Magnetron Sputtering ◽  
Rf Power

Single Crystal, High Band Gap CdS Thin Films Grown by RF Magnetron Sputtering in Argon Atmosphere for Solar Cell Applications

2018 ◽  
Vol 10 (3) ◽  
pp. 03005-1-03005-6 ◽  
Author(s):  
Rupali Kulkarni ◽  
◽  
Amit Pawbake ◽  
Ravindra Waykar ◽  
Ashok Jadhawar ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cell ◽  
Magnetron Sputtering ◽  
Single Crystal ◽  
Band Gap ◽  
Rf Magnetron Sputtering ◽  
Argon Atmosphere ◽  
Cds Thin Films ◽  
High Band

Characteristics of Ion Beam Assisted ITO Thin Films Deposited by RF Magnetron Sputtering

2014 ◽  
Vol 601 (1) ◽  
pp. 57-63 ◽  
Author(s):  
Kyong Chan Heo ◽  
Phil Kook Son ◽  
Youngku Sohn ◽  
Jonghoon Yi ◽  
Jin Hyuk Kwon ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Ion Beam ◽  
Rf Magnetron Sputtering ◽  
Ito Thin Films
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