Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide
2017 ◽
Vol 119
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pp. 238-244
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Keyword(s):
2016 ◽
Vol 133
(20)
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pp. n/a-n/a
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2016 ◽
Vol 3
(1)
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pp. 1-10
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Keyword(s):
2017 ◽
2019 ◽
Vol 20
(5)
◽
pp. 402-409
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Keyword(s):