Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide

2017 ◽  
Vol 119 ◽  
pp. 238-244 ◽  
Author(s):  
Masashi Haruki ◽  
Asuka Oda ◽  
Atsuhiko Wasada ◽  
Shin-ichi Kihara ◽  
Shigeki Takishima
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