Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic-scale trenches in supercritical carbon dioxide

2016 ◽  
Vol 133 (20) ◽  
pp. n/a-n/a ◽  
Author(s):  
Masashi Haruki ◽  
Asuka Oda ◽  
Atsuhiko Wasada ◽  
Yumi Hasegawa ◽  
Shin-ichi Kihara ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Microscopic Scale ◽  
Fluorinated Polyimide ◽  
Supercritical Carbon

Deposition of fluorinated polyimide consisting of 6FDA and TFDB into microscale trenches using supercritical carbon dioxide

2017 ◽  
Vol 119 ◽  
pp. 238-244 ◽  
Author(s):  
Masashi Haruki ◽  
Asuka Oda ◽  
Atsuhiko Wasada ◽  
Shin-ichi Kihara ◽  
Shigeki Takishima
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Fluorinated Polyimide ◽  
Supercritical Carbon
Sign in / Sign up

Export Citation Format

Share Document