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2008 ◽  
Vol 148 (9-10) ◽  
pp. 395-398 ◽  
Author(s):  
C.R. Kim ◽  
J.Y. Lee ◽  
C.M. Shin ◽  
J.Y. Leem ◽  
H. Ryu ◽  
...  
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Buffer Layer ◽  
Annealing Temperature ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Structural And Optical Properties ◽  
Layer Deposition

High-performance ZnO thin-film transistor fabricated by atomic layer deposition

2011 ◽  
Vol 26 (8) ◽  
pp. 085007 ◽  
Author(s):  
Byeong-Yun Oh ◽  
Young-Hwan Kim ◽  
Hee-Jun Lee ◽  
Byoung-Yong Kim ◽  
Hong-Gyu Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Thin Film Transistor ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition
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