Interconnecting fluidic packages and interfaces for micromachined sensors

2007 ◽  
Vol 134 (1) ◽  
pp. 278-285 ◽  
Author(s):  
Michael Pepper ◽  
Naveenkumar S. Palsandram ◽  
Peng Zhang ◽  
Moosung Lee ◽  
Hyoung J. Cho
Keyword(s):  
Micromachined Sensors

A review of micromachined sensors for automotive applications

Measurement ◽  
2019 ◽  
Vol 140 ◽  
pp. 305-322 ◽  
Author(s):  
P. Mohankumar ◽  
J. Ajayan ◽  
R. Yasodharan ◽  
P. Devendran ◽  
R. Sambasivam
Keyword(s):  
Automotive Applications ◽  
Micromachined Sensors

Pressure effects in AlAs/In x Ga 1− x As/GaAs resonant tunnelling diodes for application in micromachined sensors

2007 ◽  
Vol 16 (4) ◽  
pp. 1150-1154 ◽  
Author(s):  
Wang Jian ◽  
Zhang Wen-Dong ◽  
Xue Chen-Yang ◽  
Xiong Ji-Jun ◽  
Liu Jun ◽  
...  
Keyword(s):  
Pressure Effects ◽  
Resonant Tunnelling ◽  
Micromachined Sensors

Micromachined sensors for automotive applications

2006 ◽  
Vol 1 (4) ◽  
pp. 20-21
Author(s):  
Rainer Kallenbach ◽  
Jiri Marek ◽  
Udo-Martin Gomez ◽  
Laura Weingarten-Platz
Keyword(s):  
Automotive Applications ◽  
Micromachined Sensors

New developments in the integration of micromachined sensors

1996 ◽  
Author(s):  
Pasqualina M. Sarro ◽  
Patrick J. French ◽  
Paul T. J. Gennissen
Keyword(s):  
New Developments ◽  
Micromachined Sensors

Fiber-Top Cantilevers: A New Generation of Micromachined Sensors for Multipurpose Applications

2006 ◽  
Author(s):  
Davide Iannuzzi ◽  
Szabolcs Deladi ◽  
Herman Schreuders ◽  
Martin Slaman ◽  
Jan H. Rector ◽  
...  
Keyword(s):  
Micromachined Sensors ◽  
New Generation

Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods

2018 ◽  
Vol 268 ◽  
pp. 15-21 ◽  
Author(s):  
S. Vallejos ◽  
I. Gràcia ◽  
T. Lednický ◽  
L. Vojkuvka ◽  
E. Figueras ◽  
...  
Keyword(s):  
Chemical Vapor ◽  
Chemical Vapor Deposited ◽  
Micromachined Sensors ◽  
Zno Rods

A Micromachined Contactless Suspension With Zero Spring Constant

2012 ◽  
Author(s):  
Kirill Poletkin
Keyword(s):  
Mathematical Model ◽  
Proof Mass ◽  
Spring Constant ◽  
Micromachined Sensors

In this paper, a micromachined contactless suspension with a zero spring constant that provides possibility to significantly increasing sensitivity of micromachined sensors is studied. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electric contactless suspensions. In particular, the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the disk shaped proof mass are obtained based on the analysis of developed mathematical model of the suspension. It is shown that such a suspension can be developed in principle.

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