Investigation of the fiber-to-planar waveguide coupler as a sensor for measuring the optical properties of metal films

2005 ◽  
Vol 117 (1) ◽  
pp. 82-87 ◽  
Author(s):  
Kwang Taek Kim ◽  
In Soo Jung ◽  
Jae Pyung Mah ◽  
Kyung-Rak Sohn
Keyword(s):  
Optical Properties ◽  
Planar Waveguide ◽  
Metal Films ◽  
Waveguide Coupler

Optical Properties of Single-Mode Side-Polished Fiber Covered with Multilayer Planar Waveguide Including Metal Films

2003 ◽  
Vol 42 (Part 1, No. 11) ◽  
pp. 6910-6915 ◽  
Author(s):  
Kwang Taek Kim ◽  
Dae Sung Yoon ◽  
Cheol Ho Kim ◽  
Jae Pyung Mah
Keyword(s):  
Optical Properties ◽  
Planar Waveguide ◽  
Single Mode ◽  
Metal Films ◽  
Side Polished Fiber

The Effects of Composition on the Spectral Loss Characteristics of SiGe Planar Waveguide Structures

1992 ◽  
Vol 281 ◽  
Author(s):  
Yang Zuoya ◽  
B. L. Weiss ◽  
G. Shao ◽  
F. Namavar
Keyword(s):  
Optical Properties ◽  
Planar Waveguide ◽  
Waveguide Structure ◽  
Propagation Loss ◽  
Band Edge ◽  
Optical Confinement ◽  
Structural And Optical Properties ◽  
Edge Absorption

ABSTRACTThe effect of the Si:Ge ratio in SiGe/Si heterostructures on the structural and optical properties of SiGe/Si planar waveguide are reported here for Ge concentrations from 1 to 33.6%. The high propagation loss at 1.15 pm is due to band edge absorption, which increases as the Ge concentration increases, while the loss at longer wavelengths (1.523 pm) increases with decreasing Si concentration, due to the reduced optical confinement of the waveguide structure.

Optical properties of Er3+-doped SiO2-GeO2-Al2O3 planar waveguide fabricated by sol–gel processes

2000 ◽  
Vol 370 (1-2) ◽  
pp. 243-247 ◽  
Author(s):  
Q Xiang ◽  
Y Zhou ◽  
B.S Ooi ◽  
Y.L Lam ◽  
Y.C Chan ◽  
...  
Keyword(s):  
Optical Properties ◽  
Planar Waveguide ◽  
Sol Gel

Optical Properties of Metal Films and Their Silicides

1994 ◽  
Vol 337 ◽  
Author(s):  
M. Simard-Normandin ◽  
A. Naem ◽  
M. Saran
Keyword(s):  
Optical Properties ◽  
Optical Constants ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Metal Films ◽  
Index Of Refraction ◽  
Contact Method ◽  
Microelectronic Fabrication ◽  
Silicide Growth ◽  
Complex Index Of Refraction

ABSTRACTSilicides are used widely in microelectronic fabrication, yet there are very little data available regarding their optical constants at most wavelengths, and specifically at those of interest to G-line and I-line lithography. We have studied extensively the optical properties of Ti, Co, as metal films and as silicide films formed at various temperatures, and of CVD (chemical vapour deposition) W. Using spectroscopic ellipsometry at two angles of incidence, we have calculated the complex index of refraction N = (n, k) of these films every 10nm at 68 wavelengths between 230 and 900nm. These data are necessary to model accurately the reflectivity of wafers to study the effects of various thermal and surface treatments on silicide growth and to set exposure times for lithography. They also allow the use of reflectivity vs X as a non-contact method to map film thicknesses across wafers within the patterned devices themselves.

Optical properties of granular metal films: The Au/Ag system

1981 ◽  
Vol 79 (2) ◽  
pp. 133-136 ◽  
Author(s):  
S. Santucci ◽  
P. Picozzi ◽  
L. Paoletti ◽  
F. Tangucci
Keyword(s):  
Optical Properties ◽  
Metal Films

A refractometer based on fiber-to-liquid planar waveguide coupler

2006 ◽  
Vol 126 (2) ◽  
pp. 335-339 ◽  
Author(s):  
Kwang Taek Kim ◽  
Kyu Hyu Lee ◽  
Sueng Hwangbo ◽  
Kyung Rak Sohn
Keyword(s):  
Planar Waveguide ◽  
Waveguide Coupler

scholarly journals Mixed metal films with switchable optical properties

2002 ◽  
Vol 80 (8) ◽  
pp. 1349-1351 ◽  
Author(s):  
T. J. Richardson ◽  
J. L. Slack ◽  
B. Farangis ◽  
M. D. Rubin
Keyword(s):  
Optical Properties ◽  
Metal Films ◽  
Mixed Metal
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