Industrial application of atom probe tomography to semiconductor devices

2018 ◽  
Vol 148 ◽  
pp. 82-90 ◽  
Author(s):  
Alexander Devin Giddings ◽  
Sebastian Koelling ◽  
Yasuo Shimizu ◽  
Robert Estivill ◽  
Koji Inoue ◽  
...  
Keyword(s):  
Industrial Application ◽  
Atom Probe Tomography ◽  
Semiconductor Devices ◽  
Atom Probe

Three-Dimensional Dopant Characterization of Actual Metal–Oxide–Semiconductor Devices of 65 nm Node by Atom Probe Tomography

2013 ◽  
Vol 6 (4) ◽  
pp. 046502 ◽  
Author(s):  
Koji Inoue ◽  
Hisashi Takamizawa ◽  
Yasuo Shimizu ◽  
Fumiko Yano ◽  
Takeshi Toyama ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Atom Probe Tomography ◽  
Semiconductor Devices ◽  
Three Dimensional ◽  
Atom Probe ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor

Atom Probe Tomography on Semiconductor Devices

2016 ◽  
Vol 3 (12) ◽  
pp. 1500713 ◽  
Author(s):  
Mansoor Ali Khan ◽  
Simon P. Ringer ◽  
Rongkun Zheng
Keyword(s):  
Atom Probe Tomography ◽  
Semiconductor Devices ◽  
Atom Probe

scholarly journals Prospects for Atom Probe Tomography of Commercial Semiconductor Devices

2011 ◽  
Vol 17 (S2) ◽  
pp. 752-753 ◽  
Author(s):  
D Larson ◽  
D Lawrence ◽  
D Olson ◽  
T Prosa ◽  
D Reinhard ◽  
...  
Keyword(s):  
Atom Probe Tomography ◽  
Semiconductor Devices ◽  
Atom Probe

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

scholarly journals Correlating nanoscale secondary ion mass spectrometry and atom probe tomography analysis of uranium enrichment in metallic nuclear fuel

The Analyst ◽  
2021 ◽  
Vol 146 (1) ◽  
pp. 69-74
Author(s):  
Elizabeth Kautz ◽  
John Cliff ◽  
Timothy Lach ◽  
Dallas Reilly ◽  
Arun Devaraj
Keyword(s):  
Mass Spectrometry ◽  
Nuclear Fuel ◽  
Atom Probe Tomography ◽  
Secondary Ion Mass Spectrometry ◽  
Atom Probe ◽  
Uranium Enrichment ◽  
Length Scales ◽  
Atom Probe Tomography Analysis ◽  
Secondary Ion ◽  
Tomography Analysis

235U enrichment in a metallic nuclear fuel was measured via NanoSIMS and APT, allowing for a direct comparison of enrichment across length scales and resolutions.

scholarly journals Inside Front Cover: Atom Probe Tomography of Encapsulated Hydroxyapatite Nanoparticles (Small Methods 2/2021)

Small Methods ◽  
2021 ◽  
Vol 5 (2) ◽  
pp. 2170004
Author(s):  
Daniel S. Mosiman ◽  
Yi‐Sheng Chen ◽  
Limei Yang ◽  
Brian Hawkett ◽  
Simon P. Ringer ◽  
...  
Keyword(s):  
Atom Probe Tomography ◽  
Atom Probe ◽  
Hydroxyapatite Nanoparticles ◽  
Front Cover

scholarly journals The distribution of O and N in the surface region of laser-patterned titanium revealed by atom probe tomography

2021 ◽  
pp. 150193
Author(s):  
D. Kuczyńska-Zemła ◽  
G. Sundell ◽  
M. Zemła ◽  
M. Andersson ◽  
H. Garbacz
Keyword(s):  
Atom Probe Tomography ◽  
Surface Region ◽  
Atom Probe

scholarly journals 3D sub-nanometer analysis of glucose in an aqueous solution by cryo-atom probe tomography

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
T. M. Schwarz ◽  
C. A. Dietrich ◽  
J. Ott ◽  
E. M. Weikum ◽  
R. Lawitzki ◽  
...  
Keyword(s):  
Atom Probe Tomography ◽  
Density Functional ◽  
Chemical Characterization ◽  
Analytical Techniques ◽  
Atom Probe ◽  
Characterization Methods ◽  
Signal Deconvolution ◽  
The Stability ◽  
Frozen Solutions ◽  
3D Volume

AbstractAtom Probe Tomography (APT) is currently a well-established technique to analyse the composition of solid materials including metals, semiconductors and ceramics with up to near-atomic resolution. Using an aqueous glucose solution, we now extended the technique to frozen solutions. While the mass signals of the common glucose fragments CxHy and CxOyHz overlap with (H2O)nH from water, we achieved stoichiometrically correct values via signal deconvolution. Density functional theory (DFT) calculations were performed to investigate the stability of the detected pyranose fragments. This paper demonstrates APT’s capabilities to achieve sub-nanometre resolution in tracing whole glucose molecules in a frozen solution by using cryogenic workflows. We use a solution of defined concentration to investigate the chemical resolution capabilities as a step toward the measurement of biological molecules. Due to the evaporation of nearly intact glucose molecules, their position within the measured 3D volume of the solution can be determined with sub-nanometre resolution. Our analyses take analytical techniques to a new level, since chemical characterization methods for cryogenically-frozen solutions or biological materials are limited.

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