Nanometric resolution in glow discharge optical emission spectroscopy and Rutherford backscattering spectrometry depth profiling of metal (Cr, Al) nitride multilayers

2006 ◽  
Vol 61 (5) ◽  
pp. 545-553 ◽  
Author(s):  
R. Escobar Galindo ◽  
R. Gago ◽  
E. Forniés ◽  
A. Muñoz-Martín ◽  
A. Climent Font ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Rutherford Backscattering Spectrometry ◽  
Depth Profiling ◽  
Optical Emission ◽  
Rutherford Backscattering

Determination of the Interface Roughness between Ni-Coated Layer and Cu Substrate by Glow Discharge Optical Emission Spectroscopy Depth Profiling

2015 ◽  
Vol 1094 ◽  
pp. 181-187
Author(s):  
Yi Liu ◽  
Wei Xuan Lin ◽  
Wei Bing Ye ◽  
Huan Sheng Li ◽  
Jiong Li ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Mesh Size ◽  
Optical Emission ◽  
Interface Roughness ◽  
Depth Profiles ◽  
Information Depth ◽  
Cu Substrates

The depth profiles of Ni-coated copper substrates polished by different mesh size sandpapers were measured by the glow discharge optical emission spectroscopy (GDOES) depth profiling technique. The measured depth profiles were well fitted by the MRI-CRAS model developed recently on the basis of the Mixing-Roughness-Information depth (MRI) model and the CRAter-Simulation (CRAS) model, taking into account the pronounced crater effect upon GDOES depth profiling. The crater effect upon depth profiling was characterized quantitatively and the interface roughness values between the coated Ni layer and the Cu substrates were determined and compared with the ones measured by AFM.

Radio frequency glow discharge optical emission spectroscopy: a new weapon in the depth profiling arsenal

2002 ◽  
Vol 373 (7) ◽  
pp. 656-663 ◽  
Author(s):  
Kenneth R. Marcus ◽  
Alwyn B. Anfone ◽  
Wandee Luesaiwong ◽  
Teresa A. Hill ◽  
Dvora Perahia ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Radio Frequency Glow Discharge

scholarly journals Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

2016 ◽  
Vol 31 (11) ◽  
pp. 2207-2212 ◽  
Author(s):  
C. Schubert ◽  
V. Hoffmann ◽  
A. Kümmel ◽  
J. Sinn ◽  
M. Härtel ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Diamond Like Carbon ◽  
Compositional Depth Profiling

This article describes the compositional depth profiling (CDP) of diamond-like carbon (DLC) layers by Glow Discharge-Optical Emission Spectrometry (GD-OES).

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