scholarly journals Bulk PZT Actuator for Parallel out-of-plane motion: The Superiority of Torsion Deformation over Bending Deformation

2016 ◽  
Vol 168 ◽  
pp. 1513-1516
Author(s):  
Nadav Maccabi ◽  
Inbar (Hotzen) Grinberg ◽  
Adne Kassie ◽  
Shai Shmulevich ◽  
David Elata
Author(s):  
Risaku Toda ◽  
Eui-Hyeok Yang

This paper describes design, fabrication and preliminary characterization of a proof-of-concept vertical-travel microactuator, providing linear motion and high precision positioning in space. The microactuator is capable of providing latching function when it is un-powered to maintain its position. The microactuator consists of two opposing comb drive actuator dies, a slider and bulk PZT actuators sandwiched between the dies. The slider is inserted between clutches. Comb drives are connected to the clutches to engage/disengage clutching. Sequential activation of the comb drives (in-plane motion) and the PZT actuator (out-of-plane motion) provides cumulative linear travel of the slider. The novelty of the slider insertion approach include (1) post-fabrication engagement of comb teeth enabling thick wafer DRIE process for comb drive actuators and (2) stressed tethers enabling zero-power latching. A test device was fabricated and assembled. By applying 100V∼300V DC to the electrostatic comb drive, lateral actuation of clutches was observed. Vertical actuation by PZT was also confirmed using WYKO RST plus interferometer.


2003 ◽  
Vol 125 (5) ◽  
pp. 895-901 ◽  
Author(s):  
Michael G. Olsen ◽  
Chris J. Bourdon

In microscopic particle image velocimetry (microPIV) experiments, the entire volume of a flowfield is illuminated, resulting in all of the particles in the field of view contributing to the image. Unlike in light-sheet PIV, where the depth of the measurement volume is simply the thickness of the laser sheet, in microPIV, the measurement volume depth is a function of the image forming optics of the microscope. In a flowfield with out-of-plane motion, the measurement volume (called the depth of correlation) is also a function of the magnitude of the out-of-plane motion within the measurement volume. Equations are presented describing the depth of correlation and its dependence on out-of-plane motion. The consequences of this dependence and suggestions for limiting its significance are also presented. Another result of the out-of-plane motion is that the height of the PIV signal peak in the correlation plane will decrease. Because the height of the noise peaks will not be affected by the out-of-plane motion, this could lead to erroneous velocity measurements. An equation is introduced that describes the effect of the out-of-plane motion on the signal peak height, and its implications are discussed. Finally, the derived analytical equations are compared to results calculated using synthetic PIV images, and the agreement between the two is seen to be excellent.


1992 ◽  
Vol 96 (10) ◽  
pp. 7229-7236 ◽  
Author(s):  
Marek Z. Zgierski ◽  
Francesco Zerbetto ◽  
Young‐Dong Shin ◽  
Edward C. Lim

2017 ◽  
Vol 121 (26) ◽  
pp. 4939-4947
Author(s):  
Hongmei Xiao ◽  
Lishuang Ma ◽  
Weihai Fang ◽  
Xuebo Chen
Keyword(s):  

2001 ◽  
pp. 740-743 ◽  
Author(s):  
Hung-Yi Lin ◽  
Hsin-Hwa Hu ◽  
Weileun Fang ◽  
Ruey-Shing Huang
Keyword(s):  

2000 ◽  
Author(s):  
Hung-Yi Lin ◽  
Weileun Fang

Abstract In the present study, an out-of-plane motion actuator driven by the electrostatic force is designed and fabricated. The electrostatic force generated by the gap closing electrodes and the comb electrodes will be studied. Moreover, a lever motion transmitting mechanism is proposed to modulate the motion of the actuators. Although the space between the driving electrodes is limited, the lever motion transmitting mechanism could enlarge the traveling distance. The applications of the out-of-plane motion actuator are remarkably increased due to the assistant of the transmitting mechanism.


Sign in / Sign up

Export Citation Format

Share Document