Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface
2019 ◽
Vol 56
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pp. 506-512
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Keyword(s):
Keyword(s):
Keyword(s):
2009 ◽
Vol 76-78
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pp. 387-391
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2013 ◽
Vol 30
(2)
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pp. 148-151
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Keyword(s):
2012 ◽
Vol 7
(2)
◽
pp. 198-201
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