Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

2017 ◽  
Vol 50 ◽  
pp. 8-19 ◽  
Author(s):  
Bita Daemi ◽  
Peter Ekberg ◽  
Lars Mattsson
Keyword(s):  
Image Analysis ◽  
Performance Evaluation ◽  
High Precision ◽  
Laser Micromachining ◽  
Optical Metrology

B-33 High-precision measurement of curl distance by digital image analysis

2014 ◽  
Vol 2014 (0) ◽  
pp. _B-33-1_-_B-33-9_ ◽  
Author(s):  
Kazuhiro HATTORI ◽  
Masaru TOKUMOTO ◽  
Koshi KASHIWAZAKI ◽  
Norikazu MAENO
Keyword(s):  
Image Analysis ◽  
High Precision ◽  
Digital Image ◽  
Precision Measurement ◽  
Digital Image Analysis ◽  
High Precision Measurement

High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner

2014 ◽  
Author(s):  
B. Jaeggi ◽  
B. Neuenschwander ◽  
M. Zimmermann ◽  
L. Penning ◽  
R. deLoor ◽  
...  
Keyword(s):  
High Precision ◽  
High Throughput ◽  
Laser Micromachining ◽  
Line Scanner
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