Measurement of highly reflective surface shape using wavelength tuning Fizeau interferometer and polynomial window function

2016 ◽  
Vol 45 ◽  
pp. 187-194 ◽  
Author(s):  
Yangjin Kim ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function ◽  
Fizeau Interferometer ◽  
Reflective Surface

Simultaneous measurement of the surface shape and thickness for an optical flat with a wavelength-tuning Fizeau interferometer with suppression of drift error

2020 ◽  
Vol 59 (4) ◽  
pp. 991
Author(s):  
Yangjin Kim ◽  
Younghoon Moon ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Simultaneous Measurement ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Fizeau Interferometer

scholarly journals Precise Measurement of the Surface Shape of Silicon Wafer by Using a New Phase-Shifting Algorithm and Wavelength-Tuning Interferometer

2020 ◽  
Vol 10 (9) ◽  
pp. 3250
Author(s):  
Fuqing Miao ◽  
Seokyoung Ahn ◽  
Yangjin Kim
Keyword(s):  
Silicon Wafer ◽  
Phase Error ◽  
Surface Profile ◽  
Phase Shifting ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function ◽  
Phase Shift Error ◽  
Coupling Error ◽  
New Phase

In wavelength-tuning interferometry, the surface profile of the optical component is a key evaluation index. However, the systematic errors caused by the coupling error between the higher harmonics and phase shift error are considerable. In this research, a new 10N − 9 phase-shifting algorithm comprising a new polynomial window function and a DFT is developed. A new polynomial window function is developed based on characteristic polynomial theory. The characteristic of the new 10N − 9 algorithm is represented in the frequency domain by Fourier description. The phase error of the new algorithm is also discussed and compared with other phase-shifting algorithms. The surface profile of a silicon wafer was measured by using the 10N − 9 algorithm and a wavelength-tuning interferometer. The repeatability measurement error across 20 experiments was 2.045 nm, which indicates that the new 10N − 9 algorithm outperforms the conventional phase-shifting algorithm.

scholarly journals Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function

2015 ◽  
Vol 23 (25) ◽  
pp. 32869 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Optical Thickness ◽  
Simultaneous Measurement ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Window Function

scholarly journals Wide aperture piezoceramic deformable mirrors for aberration correction in high-power lasers

2016 ◽  
Vol 4 ◽  
Author(s):  
Vadim Samarkin ◽  
Alexander Alexandrov ◽  
Gilles Borsoni ◽  
Takahisa Jitsuno ◽  
Pavel Romanov ◽  
...  
Keyword(s):  
High Power ◽  
Surface Shape ◽  
Wavefront Sensor ◽  
Deformable Mirror ◽  
Deformable Mirrors ◽  
Aberration Correction ◽  
Response Functions ◽  
Fizeau Interferometer ◽  
High Power Lasers ◽  
Wide Aperture

The deformable mirror with the size of $410~\text{mm}\times 468~\text{mm}$ controlled by the bimorph piezoceramic plates and multilayer piezoceramic stacks was developed. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack–Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of $0.033~{\rm\mu}\text{m}$ (RMS). The possibility of correction of the aberrations in high-power lasers was numerically demonstrated.

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