A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

2013 ◽  
Vol 37 (3) ◽  
pp. 771-781 ◽  
Author(s):  
Xinghui Li ◽  
Wei Gao ◽  
Hiroshi Muto ◽  
Yuki Shimizu ◽  
So Ito ◽  
...  
Keyword(s):  
Degree Of Freedom ◽  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Six Degree Of Freedom ◽  
Planar Motion Stage

Precision positioning of a five degree-of-freedom planar motion stage

Mechatronics ◽  
2005 ◽  
Vol 15 (8) ◽  
pp. 969-987 ◽  
Author(s):  
Shuichi Dejima ◽  
Wei Gao ◽  
Hiroki Shimizu ◽  
Satoshi Kiyono ◽  
Yoshiyuki Tomita
Keyword(s):  
Degree Of Freedom ◽  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Planar Motion Stage

scholarly journals Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage

Procedia CIRP ◽  
2018 ◽  
Vol 75 ◽  
pp. 355-360
Author(s):  
Yuki Shimizu ◽  
Masaya Furuta ◽  
Yuan-Liu Chen ◽  
Xiuguo Chen ◽  
Hiraku Matsukuma ◽  
...  
Keyword(s):  
Uncertainty Analysis ◽  
Degree Of Freedom ◽  
Planar Motion ◽  
Motion Stage ◽  
Six Degree Of Freedom ◽  
Planar Motion Stage

A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning

2004 ◽  
Vol 28 (3) ◽  
pp. 329-337 ◽  
Author(s):  
Wei Gao ◽  
Shuichi Dejima ◽  
Hiroaki Yanai ◽  
Kei Katakura ◽  
Satoshi Kiyono ◽  
...  
Keyword(s):  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Planar Motion Stage

A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning

2011 ◽  
Vol 189-193 ◽  
pp. 4121-4125 ◽  
Author(s):  
Song Yi Dian ◽  
Hang Dong ◽  
Wei Gao
Keyword(s):  
Sensorless Control ◽  
Low Cost ◽  
Planar Motion ◽  
Precision Positioning ◽  
Suggested Strategy ◽  
Motion Stage ◽  
Planar Motion Stage

In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.

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