A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning

2004 ◽  
Vol 28 (3) ◽  
pp. 329-337 ◽  
Author(s):  
Wei Gao ◽  
Shuichi Dejima ◽  
Hiroaki Yanai ◽  
Kei Katakura ◽  
Satoshi Kiyono ◽  
...  
Keyword(s):  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Planar Motion Stage

A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning

2011 ◽  
Vol 189-193 ◽  
pp. 4121-4125 ◽  
Author(s):  
Song Yi Dian ◽  
Hang Dong ◽  
Wei Gao
Keyword(s):  
Sensorless Control ◽  
Low Cost ◽  
Planar Motion ◽  
Precision Positioning ◽  
Suggested Strategy ◽  
Motion Stage ◽  
Planar Motion Stage

In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.

A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage

2013 ◽  
Vol 37 (3) ◽  
pp. 771-781 ◽  
Author(s):  
Xinghui Li ◽  
Wei Gao ◽  
Hiroshi Muto ◽  
Yuki Shimizu ◽  
So Ito ◽  
...  
Keyword(s):  
Degree Of Freedom ◽  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Six Degree Of Freedom ◽  
Planar Motion Stage

Precision positioning of a five degree-of-freedom planar motion stage

Mechatronics ◽  
2005 ◽  
Vol 15 (8) ◽  
pp. 969-987 ◽  
Author(s):  
Shuichi Dejima ◽  
Wei Gao ◽  
Hiroki Shimizu ◽  
Satoshi Kiyono ◽  
Yoshiyuki Tomita
Keyword(s):  
Degree Of Freedom ◽  
Planar Motion ◽  
Precision Positioning ◽  
Motion Stage ◽  
Planar Motion Stage

Modeling and analysis of a 3-DOF Lorentz-force-driven planar motion stage for nanopositioning

Mechatronics ◽  
2010 ◽  
Vol 20 (5) ◽  
pp. 553-565 ◽  
Author(s):  
Jin Lei ◽  
Xin Luo ◽  
Xuedong Chen ◽  
Tianhong Yan
Keyword(s):  
Lorentz Force ◽  
Planar Motion ◽  
Modeling And Analysis ◽  
Motion Stage ◽  
Planar Motion Stage

Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage

2014 ◽  
Vol 22 (11) ◽  
pp. 3067-3073
Author(s):  
佃松宜 DIAN Song-yi ◽  
向国菲 XIANG Guo-fei ◽  
蒲明 PU Ming
Keyword(s):  
Sliding Mode ◽  
Sensorless Control ◽  
Sliding Mode Observer ◽  
Planar Motion ◽  
Motion Stage ◽  
Planar Motion Stage
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