Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage

2013 ◽  
Vol 37 (3) ◽  
pp. 599-605 ◽  
Author(s):  
Muzheng Xiao ◽  
Tomohiko Takamura ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu
Keyword(s):  
Error Analysis ◽  
Random Error ◽  
Profile Measurement ◽  
Optical Surface ◽  
Rotation Stage

Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices - Error Analysis and Pre-Experiment-

2010 ◽  
Vol 447-448 ◽  
pp. 604-608 ◽  
Author(s):  
Mu Zheng Xiao ◽  
Satomi Jujo ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu
Keyword(s):  
Error Analysis ◽  
High Surface ◽  
Measuring Method ◽  
Optical Devices ◽  
Profile Measurement ◽  
Aspheric Surface ◽  
Optical Surface ◽  
Measuring Range ◽  
Angle Difference ◽  
Flat Mirror

Large aspheric mirrors with diameter over 300 millimeters with high surface accuracy are wildly used in many areas such as astronomical telescopes. Interferometers are widely used in profile measurement of optical flat and sphere. However, standard reference aspheric surface which is necessary for this method is difficult to make. Scanning defletometry based on ESAD (Extended Shear Angle Difference) is used to measure ultra-precise large near-flat and slight curved optical surface with the accuracy of sub-nanometer. However, it is not possible for it to measure aspheric surface because of the limitation of the measuring range of autocollimators. We proposed a new measuring method to scan the surface of a large aspheric optical surface using autocollimator with rotatable optical devices fixed on linear motion stage. To eliminate the influence of the pitching error of the scanning stage, we use two mirrors reflecting laser comes from autocollimator, which have the same effect with a pentaprism used in ESAD. To enlarge the measuring range of the autocollimator, we use a rotatable mirror to fit the changes of the slope of the mirror surface under measurement. The error analysis of the method is done. Measurement of an optical flat mirror and a sphere mirror with diameter of 50 mm and biggest slope of 6000 arc-second are done. The rotatable optical devices that we designed are proved effective on eliminating the pitching error of the moving stage.

Generalized Two-Point Method for Straightness Profile Measurement - Error Propagation and Experimental Results

2014 ◽  
Vol 939 ◽  
pp. 600-606 ◽  
Author(s):  
Eiki Okuyama ◽  
Shingo Asano ◽  
Yuichi Suzuki ◽  
Hiromi Ishikawa
Keyword(s):  
Random Error ◽  
Error Propagation ◽  
Point Method ◽  
Experimental Results ◽  
Displacement Sensor ◽  
Profile Measurement ◽  
Parasitic Motion ◽  
Displacement Sensors ◽  
Straightness Error ◽  
Error Motion

In the straightness profile measurement of a mechanical workpiece, hardware datums have been the traditional standard. However, when the straightness profile is measured using a scanning displacement sensor set on an X-stage as the hardware datums, output of a displacement sensor includes the signal of straightness profile and the sensor’s parasitic motion, i.e. straightness error motion. Then, error separation techniques of the straightness profile from parasitic motions have been developed. For example, two-point method uses two displacement sensors and separates the sensor’s straightness error motion from the straightness profile. However, the conventional two-point method cannot measure a large-scale workpiece because the large sampling number causes random error amplification. In this article, the influence of the random error of generalized two-point method is shown. As the result of the theoretical analysis and numerical analysis, random error propagation decrease when sampling number increase. Further, experimental results obtained by generalized two-point method with large sampling number are analyzed using Wavelet transform and influence of error of the generalized two-point method is discussed in the space-spatial frequency domain.

Absolute and random error analysis of the dynamic imaging microellipsometry technique

1989 ◽  
Vol 28 (15) ◽  
pp. 3187 ◽  
Author(s):  
Ralph F. Cohn ◽  
James W. Wagner
Keyword(s):  
Error Analysis ◽  
Random Error ◽  
Dynamic Imaging

scholarly journals Broadband measurements of nanofiber devices: Repeatability and random error analysis

2010 ◽  
Author(s):  
T. Mitch Wallis ◽  
Atif Imtiaz ◽  
Sang-Hyun Lim ◽  
Pavel Kabos ◽  
Kichul Kim ◽  
...  
Keyword(s):  
Error Analysis ◽  
Random Error

Study on error analysis and accuracy improvement for aspheric profile measurement

2017 ◽  
Vol 28 (6) ◽  
pp. 065004 ◽  
Author(s):  
Huimin Gao ◽  
Xiaodong Zhang ◽  
Fengzhou Fang
Keyword(s):  
Error Analysis ◽  
Profile Measurement ◽  
Accuracy Improvement
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