Development of a new apparatus for ultrasonic vibration-assisted glass hot embossing process

Jung-Chung Hung; Yen-Pin Tsai; Chinghua Hung

doi:10.1016/j.precisioneng.2012.06.002

Development of a new apparatus for ultrasonic vibration-assisted glass hot embossing process

Precision Engineering ◽

10.1016/j.precisioneng.2012.06.002 ◽

2013 ◽

Vol 37 (1) ◽

pp. 222-227 ◽

Cited By ~ 19

Author(s):

Jung-Chung Hung ◽

Yen-Pin Tsai ◽

Chinghua Hung

Keyword(s):

Ultrasonic Vibration ◽

Hot Embossing ◽

New Apparatus

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Ultrasonic Vibration Hot Embossing

International Polymer Processing ◽

10.3139/217.2009 ◽

2005 ◽

Vol 20 (4) ◽

pp. 449-452 ◽

Cited By ~ 10

Author(s):

S.-J. Liu ◽

Y.-T. Dung

Keyword(s):

Ultrasonic Vibration ◽

Hot Embossing

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Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint

Lithography ◽

10.5772/8191 ◽

2010 ◽

Cited By ~ 2

Author(s):

Harutaka Mekaru

Keyword(s):

Ultrasonic Vibration ◽

Hot Embossing

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Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration

Microsystem Technologies ◽

10.1007/s00542-006-0203-2 ◽

2006 ◽

Vol 13 (3-4) ◽

pp. 385-391 ◽

Cited By ~ 30

Author(s):

Harutaka Mekaru ◽

Osamu Nakamura ◽

Osamu Maruyama ◽

Ryutaro Maeda ◽

Tadashi Hattori

Keyword(s):

Ultrasonic Vibration ◽

Hot Embossing

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Development of Ultrasonic Vibration Hot Embossing Replication Technique

The Proceedings of the Machine Design and Tribology Division meeting in JSME ◽

10.1299/jsmemdt.2004.4.71 ◽

2004 ◽

Vol 2004.4 (0) ◽

pp. 71-72

Author(s):

Harutaka MEKARU ◽

Osamu NAKAMURA ◽

Tadashi HATTORI ◽

Osamu MARUYAMA

Keyword(s):

Ultrasonic Vibration ◽

Hot Embossing ◽

Replication Technique

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Fabrication of Plastic Micro Features on Microporous Mold by Hot Embossing

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.58-60.822 ◽

2011 ◽

Vol 58-60 ◽

pp. 822-826 ◽

Cited By ~ 1

Author(s):

Hang Liu ◽

Hong Hu ◽

Xing Wei Zhang

Keyword(s):

Stainless Steel ◽

High Precision ◽

Ultrasonic Vibration ◽

Hot Embossing ◽

Ultrasonic Welding ◽

Ultrasonic Energy ◽

Ultrasonic Agitation ◽

Welding Machine ◽

Micro Features

The method of using ultrasonic heating to aid high precision moulding of micro features has been studies. The study developed a method of using ultrasonic vibration to heat the polymer and hot embossing high precision micro features. A commercial ultrasonic welding machine is converted to provide the heating of polymer and mold then into precision micro features for study of ultrasonic heating and the microflow of polymer under ultrasonic agitation. A stainless steel microporous mold of 200µm thick with through holes of 50µm and 200µm in diameter were used. Using a frequency of 35kHz, the microflow behavior of PC (Polycarbonate) and PE (Polyethylene) in the microchannels were investigated. The differing properties of microflow for these two types of polymer give indication on the theoretical and practical agreement on prediction of microflow under ultrasonic energy.

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