Resonance frequency shift in a cavity with a thin conducting film near a conducting wall

2007 ◽  
Vol 363 (1-2) ◽  
pp. 33-37 ◽  
Author(s):  
C. Braggio ◽  
G. Bressi ◽  
G. Carugno ◽  
A.V. Dodonov ◽  
V.V. Dodonov ◽  
...  
Keyword(s):  
Resonance Frequency ◽  
Frequency Shift ◽  
Conducting Film ◽  
Conducting Wall ◽  
Thin Conducting ◽  
Resonance Frequency Shift ◽  
Thin Conducting Film

Reliability and stability of thin-film amorphous silicon MEMS on glass substrates

2011 ◽  
Vol 1299 ◽  
Author(s):  
P. M. Sousa ◽  
V. Chu ◽  
J. P. Conde
Keyword(s):  
Thin Film ◽  
Resonance Frequency ◽  
Frequency Shift ◽  
Amorphous Silicon ◽  
Structural Damage ◽  
Chemical Vapor ◽  
Stability Study ◽  
Glass Substrates ◽  
Resonance Frequency Shift ◽  
Mems Resonators

ABSTRACTIn this work, we present a reliability and stability study of doped hydrogenated amorphous silicon (n+-a-Si:H) thin-film silicon MEMS resonators. The n+-a-Si:H structural material was deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) and processed using surface micromachining at a maximum deposition temperature of 110 ºC. n+-a-Si:H resonant bridges can withstand the industry standard of 1011 cycles at high load with no structural damage. Tests performed up to 3x1011 cycles showed a negligible level of degradation in Q during the entire cycling period which in addition shows the high stability of the resonator. In measurements both in vacuum and in air a resonance frequency shift which is proportional to the number of cycles is established. This shift is between 0.1 and 0.4%/1x1011 cycles depending on the applied VDC. When following the resonance frequency in vacuum during cyclic loading, desorption of air molecules from the resonator surface is responsible for an initial higher resonance frequency shift before the linear dependence is established.

scholarly journals Correcting heat-induced chemical shift distortions in proton resonance frequency-shift thermometry

2015 ◽  
Vol 76 (1) ◽  
pp. 172-182 ◽  
Author(s):  
Pooja Gaur ◽  
Ari Partanen ◽  
Beat Werner ◽  
Pejman Ghanouni ◽  
Rachelle Bitton ◽  
...  
Keyword(s):  
Chemical Shift ◽  
Resonance Frequency ◽  
Frequency Shift ◽  
Proton Resonance Frequency ◽  
Proton Resonance ◽  
Proton Resonance Frequency Shift ◽  
Resonance Frequency Shift

Investigation on Resonance Effects of Closely Resonating Nano-Pillars Attached to SAW Resonator

2011 ◽  
Vol 403-408 ◽  
pp. 1183-1187
Author(s):  
N. Ramakrishnan ◽  
Harshal B. Nemade ◽  
Roy Paily Palathinkal
Keyword(s):  
Acoustic Wave ◽  
Resonance Frequency ◽  
Frequency Shift ◽  
Fem Simulation ◽  
Mass Loading ◽  
Loading Effect ◽  
Resonance Effects ◽  
Additional Information ◽  
Resonance Frequency Shift ◽  
Small Change

Surface acoustic wave (SAW) sensors form an important class of micro sensors in the microelecto mechanical systems (MEMS) family. Mass loading effect of a sensing medium is one of the prime sensing principles in SAW sensors. Recently we reported mass loading effect of high aspect ratio nano-pillars attached to a SAW resonator. We observed increase in resonance frequency of the SAW resonator in addition to the general mass loading characteristics. We concluded that when the resonance frequency of the pillar is equal to the SAW resonator frequency, the resonance frequency shift caused by mass loading of pillar tends to a negligible value. When such resonating pillars are used as sensing medium in SAW sensors, even a very small change in the dimension of the pillar will offer significant resonance frequency shift. Accordingly, high sensitive SAW sensors can be developed. However in practice it’s quite difficult to manufacture nano-pillars with accurate dimensions such that they resonate with SAW resonator. There is more probability that the pillars may closely resonate with SAW device and offer mass loading. In the present work we have extended our earlier work and performed finite element method (FEM) simulation to study the insight physics of the closely resonating pillars and their effects on acoustic wave propagating on SAW substrate. In this paper we present the discussion on the resonance effects of typical closely resonating pillars on resonance frequency spectrum of the SAW resonator and observations in the pressure wave at the contact surface of the pillar and SAW resonator substrate. It is observed that when the nano-pillars closely resonate with SAW resonator, the pillar oscillations combine with waves propagating in the substrate and introduce beat frequencies. The results and discussion of this paper adds additional information in designing SAW based coupled resonating systems.

scholarly journals Interaction of an electromagnetic E-wave with a thin conducting film between two dielectric media in the case of an anisotropic isoenergetic surface and impurity scattering

2021 ◽  
Vol 2103 (1) ◽  
pp. 012156
Author(s):  
I A Kuznetsova ◽  
D N Romanov ◽  
A A Yushkanov
Keyword(s):  
Impurity Scattering ◽  
Charge Carriers ◽  
Surface Scattering ◽  
Conducting Film ◽  
Dielectric Media ◽  
Thin Conducting ◽  
Transmission And Absorption ◽  
Thin Conducting Film ◽  
The Magnetic Field ◽  
Isoenergetic Surface

Abstract The coefficients of reflection, transmission and absorption are calculated in the framework of the kinetic approach, when an electromagnetic E-wave interacts with a thin conducting film located between two dielectric media. To account for the surface scattering of charge carriers is used a model of mirror-diffuse boundary conditions, assuming that the specularity coefficients of the upper and lower surfaces of the film differ from each other. The electromagnetic wave falls on the upper surface of the film at an arbitrary angle. The case of an anisotropic isoenergetic surface of a conductor having the form of a three-axis ellipsoid, one of the main axes of which is parallel to the magnetic field strength of the wave, and the other is perpendicular to the film surfaces, is considered. The impurity scattering of electrons (holes) is dominated in the volume of the conductor. The dependence of the absorption coefficient on the parameters of the isoenergetic surface of the conductor is analyzed.

scholarly journals CO Gas-Induced Resonance Frequency Shift of ZnO-Functionalized Microcantilever in Humid Air

2017 ◽  
Vol 2017 ◽  
pp. 1-7 ◽  
Author(s):  
Lia Aprilia ◽  
Ratno Nuryadi ◽  
Dwi Gustiono ◽  
Nurmahmudi ◽  
Arief Udhiarto ◽  
...  
Keyword(s):  
Carbon Monoxide ◽  
Zinc Oxide ◽  
Water Vapor ◽  
Resonance Frequency ◽  
Frequency Shift ◽  
Hydrothermal Method ◽  
Gas Flow ◽  
Humid Air ◽  
Resonance Frequency Shift ◽  
Co Gas

Resonance frequency shift of a zinc oxide- (ZnO-) functionalized microcantilever as a response to carbon monoxide (CO) gas has been investigated. Here, ZnO microrods were grown on the microcantilever surface by a hydrothermal method. The measurement of resonance frequency of the microcantilever vibrations due to the gas was carried out in two conditions, that is, gas flow with and without air pumping into an experiment chamber. The results show that the resonance frequency of the ZnO-functionalized microcantilever decreases because of CO in air pumping condition, while it increases when CO is introduced without air pumping. Such change in the resonance frequency is influenced by water vapor condition, and a possible model based on water-CO combination was proposed.

Resonance Frequency Shift of a Two-Level Atom in a Pulsed Optical Trap

2007 ◽  
Vol 51 (91) ◽  
pp. 294 ◽  
Author(s):  
Jai Min Choi ◽  
Gee-Na Kim ◽  
D. Cho ◽  
C. I. Sukenik
Keyword(s):  
Resonance Frequency ◽  
Frequency Shift ◽  
Optical Trap ◽  
Level Atom ◽  
Resonance Frequency Shift
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