The field emission of indium-doped ZnO films fabricated by room temperature DC magnetron sputtering

2012 ◽  
Vol 407 (1) ◽  
pp. 64-67 ◽  
Author(s):  
Fan Ye ◽  
Xing-Min Cai ◽  
Fu-Ping Dai ◽  
Dong-Ping Zhang ◽  
Ping Fan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Field Emission ◽  
Room Temperature ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno

Room temperature DC magnetron sputtering deposition and field emission of Al-doped ZnO films

2011 ◽  
Vol 208 (8) ◽  
pp. 1908-1912 ◽  
Author(s):  
Fan Ye ◽  
Xing-Min Cai ◽  
Fu-Ping Dai ◽  
Dong-Ping Zhang ◽  
Ping Fan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Field Emission ◽  
Room Temperature ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Doped Zno

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure
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