Influence of substrate temperature on the microstructure and optical properties of hydrogenated silicon thin film prepared with pure silane

2008 ◽  
Vol 403 (13-16) ◽  
pp. 2282-2287 ◽  
Author(s):  
S.B. Li ◽  
Z.M. Wu ◽  
W. Li ◽  
Y.D. Jiang ◽  
N.M. Liao
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Substrate Temperature ◽  
Silicon Thin Film ◽  
Hydrogenated Silicon ◽  
Influence Of Substrate

scholarly journals Influence of substrate temperature on the structural and optical properties of crystalline ZnO films obtained by pulsed spray pyrolysis

2015 ◽  
Vol 47 (5) ◽  
pp. 601-606 ◽  
Author(s):  
Oleksandr Dobrozhan ◽  
Denys Kurbatov ◽  
Anatoliy Opanasyuk ◽  
Hyeonsik Cheong ◽  
Andreu Cabot
Keyword(s):  
Optical Properties ◽  
Substrate Temperature ◽  
Spray Pyrolysis ◽  
Zno Films ◽  
Structural And Optical Properties ◽  
Influence Of Substrate

Soluble polycyclosilane–polysiloxane hybrid material and silicon thin film with optical properties at 193 nm and etch selectivity

2015 ◽  
Vol 3 (2) ◽  
pp. 239-242 ◽  
Author(s):  
Sung Jin Park ◽  
Hyeon Mo Cho ◽  
Myong Euy Lee ◽  
Miyoung Kim ◽  
Kwenwoo Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Optical Properties ◽  
Hybrid Materials ◽  
Hybrid Material ◽  
Silicon Thin Film ◽  
New Class ◽  
Silicon Thin Films ◽  
193 Nm

Silicon thin films that fulfil the needs of current semiconductor lithography were prepared from a new class of polycyclosilane–polysiloxane hybrid materials.

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