Integrated Linear-processing Ion-beam Sputtering System Using a Meter-scale Ribbon-beam

Physics Procedia ◽

10.1016/j.phpro.2017.09.057 ◽

2017 ◽

Vol 90 ◽

pp. 187-192

Author(s):

Nicholas R. White ◽

August O. Westner

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Ribbon Beam ◽

Sputtering System

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Ultra-low-reflectance, high-uniformity, multilayer-antireflection coatings on large substrates deposited using an ion-beam sputtering system with a customized planetary rotation stage

10.1117/12.896747 ◽

2011 ◽

Cited By ~ 1

Author(s):

Svetlana Dligatch ◽

Mark Gross ◽

Anatoli Chtanov

Keyword(s):

Ion Beam ◽

Antireflection Coatings ◽

Ion Beam Sputtering ◽

Planetary Rotation ◽

High Uniformity ◽

Beam Sputtering ◽

Rotation Stage ◽

Sputtering System

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Argon ion beam voltage in a dual ion beam sputtering system influence on the aluminum nitride films microstructure

Vacuum ◽

10.1016/j.vacuum.2005.01.082 ◽

2005 ◽

Vol 78 (2-4) ◽

pp. 539-543 ◽

Cited By ~ 3

Author(s):

Sheng Han ◽

Hong-Ying Chen ◽

Han C. Shih

Keyword(s):

Aluminum Nitride ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Voltage ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Argon Ion ◽

Sputtering System

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Argon ion beam voltages influence the microstructure of aluminum nitride films in a dual ion beam sputtering system

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2005.08.042 ◽

2006 ◽

Vol 242 (1-2) ◽

pp. 396-398 ◽

Cited By ~ 2

Author(s):

Hong-Ying Chen ◽

Sheng Han ◽

Han C. Shih

Keyword(s):

Aluminum Nitride ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Argon Ion ◽

Sputtering System

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Effect of ion beam energy on density, roughness & uniformity of Co film deposited using ion beam sputtering system

10.1063/1.4710191 ◽

2012 ◽

Author(s):

Rajnish Dhawan ◽

Sanjay Rai ◽

G. S. Lodha

Keyword(s):

Beam Energy ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Sputtering System

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Development of an ion-beam sputtering system for depositing thin films and multilayers of alloys and compounds

Applied Surface Science ◽

10.1016/s0169-4332(02)01120-0 ◽

2003 ◽

Vol 205 (1-4) ◽

pp. 309-322 ◽

Cited By ~ 19

Author(s):

Mukul Gupta ◽

Ajay Gupta ◽

D.M Phase ◽

S.M Chaudhari ◽

B.A Dasannacharya

Keyword(s):

Thin Films ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Alloys And Compounds ◽

Sputtering System

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Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System

Journal of Electronic Materials ◽

10.1007/s11664-006-0023-2 ◽

2006 ◽

Vol 36 (1) ◽

pp. 81-87 ◽

Cited By ~ 10

Author(s):

T. L. Hu ◽

S. W. Mao ◽

C. P. Chao ◽

M. F. Wu ◽

H. L. Huang ◽

...

Keyword(s):

Thin Film ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Sputtering System

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Mechanical properties of BCN films deposited by dual cesium ion beam sputtering system

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00102-6 ◽

2003 ◽

Vol 169-170 ◽

pp. 340-343 ◽

Cited By ~ 14

Author(s):

Eungsun Byon ◽

Jong-Kuk Kim ◽

Sunghun Lee ◽

Jun-Hee Hah ◽

Katsuhisa Sugimoto

Keyword(s):

Mechanical Properties ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Cesium Ion ◽

Beam Sputtering ◽

Sputtering System

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Effect of argon ion beam voltages on the microstructure of aluminum nitride films prepared at room temperature by a dual ion beam sputtering system

Applied Surface Science ◽

10.1016/j.apsusc.2004.01.039 ◽

2004 ◽

Vol 228 (1-4) ◽

pp. 128-134 ◽

Cited By ~ 9

Author(s):

Hong-Ying Chen ◽

Sheng Han ◽

Chih-Hsuan Cheng ◽

Han C. Shih

Keyword(s):

Aluminum Nitride ◽

Room Temperature ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Argon Ion ◽

Sputtering System

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Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method

Applied Optics ◽

10.1364/ao.50.00c316 ◽

2011 ◽

Vol 50 (9) ◽

pp. C316 ◽

Cited By ~ 13

Author(s):

Mark Gross ◽

Svetlana Dligatch ◽

Anatoli Chtanov

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Planetary Rotation ◽

Rotation Method ◽

Coating Uniformity ◽

Beam Sputtering ◽

Sputtering System

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Effects of annealing and periodic ion bombardment on the soft magnetism of FexN films by a double ion beam sputtering system

Journal of Applied Physics ◽

10.1063/1.342343 ◽

1988 ◽

Vol 64 (10) ◽

pp. 5449-5451 ◽

Cited By ~ 10

Author(s):

M. Naoe ◽

M. Nagakubo ◽

T. Yamamoto

Keyword(s):

Ion Beam ◽

Ion Bombardment ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Soft Magnetism ◽

Sputtering System

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