Mechanical Response of a Micro Silicon Membrane: Model Validation by Finite Element Method
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2018 ◽
Vol 1063
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pp. 012104
2018 ◽
Vol 5
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pp. 169-180
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2018 ◽
Vol 4
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2019 ◽
Vol 17
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pp. 1950052
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1999 ◽
Vol 122
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pp. 44-50
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