scholarly journals Effects of axisymmetric magnetic field on the distribution of Macroparticles on TiN and (Ti, Al) N films by arc ion plating

2011 ◽  
Vol 18 ◽  
pp. 193-201
Author(s):  
J.Q. Xiao ◽  
W.C. Lang ◽  
J. Gong ◽  
C. Sun ◽  
R.F. Huang ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Arc Ion Plating ◽  
Ion Plating

Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Deposited by Arc Ion Plating

2015 ◽  
Vol 28 (8) ◽  
pp. 984-993 ◽  
Author(s):  
Yan-Hui Zhao ◽  
Wen-Jin Yang ◽  
Chao-Qian Guo ◽  
Yu-Qiu Chen ◽  
Bao-Hai Yu ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Wear Resistance ◽  
Axial Magnetic Field ◽  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

scholarly journals Effects of Substrate Pulse Bias Duty Cycle on the Microstructure and Mechanical Properties of Ti–Cu–N Films Deposited by Magnetic Field-Enhanced Arc Ion Plating

2017 ◽  
Vol 30 (2) ◽  
pp. 176-184 ◽  
Author(s):  
Sheng-Sheng Zhao ◽  
Yan-Hui Zhao ◽  
Lv-Sha Cheng ◽  
Vladimir Viktorovich Denisov ◽  
Nikolay Nikolaevich Koval ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Mechanical Properties ◽  
Duty Cycle ◽  
Arc Ion Plating ◽  
Ion Plating ◽  
Microstructure And Mechanical Properties

Coupled Magnetic Field Enhanced Arc Ion Plating: Process, Plasma and Deposited Film

2011 ◽  
Vol 399-401 ◽  
pp. 2018-2025
Author(s):  
Wen Chang Lang
Keyword(s):  
Magnetic Field ◽  
Deposition Rate ◽  
Interaction Mechanism ◽  
Film Surface ◽  
Deposition Process ◽  
Ionization Rate ◽  
Ion Density ◽  
Arc Ion Plating ◽  
Ion Plating ◽  
Element Simulation

Based on the interaction mechanism of the plasma and the magnetic field, this paper has proposed the deposition process of coupled magnetic field to enhance the arc ion plating. Meanwhile, it has also analyzed the distribution, the polarity and the configuration of coupled magnetic field combining with the finite element simulation. The influence of coupled magnetic field on the distribution, the ionization rate, the surface quality of film and the deposition rate of arc ion plating has been also systematically discussed in this paper. What’s more, the reduction mechanism of coupled magnetic field for the marco-particles on film surface has been also proposed. The studies have shown that the DC coupled magnetic field can not only improve the focusing properties and the transmission uniformity of plasma, but also enhance the collision between ions and improve the ionization rate of plasma and the excitation illumination intensity of ions as well as improve the ion density. With the increase of the strength of DC coupled magnetic field, the number and the size of marco-particles on film surface have been greatly reduced and the deposition rate of film has been exponentially increased. The plasma has been gradually focalized and diverged under the influence of pulsation coupled magnetic field and formed the plasma with a dynamic distribution, which has enhanced the interaction between the plasma and the marco-particles as well as further purified the marco-particles.

scholarly journals CrN Films Deposited by Magnetic Field-enhanced Arc Ion Plating

2017 ◽  
Author(s):  
Yanhui Zhao ◽  
Zhanqi Liu ◽  
Chaoqian Guo ◽  
Guoqiang Lin ◽  
Baohai Yu
Keyword(s):  
Magnetic Field ◽  
Arc Ion Plating ◽  
Ion Plating

INFLUENCE OF AXISYMMETRIC MAGNETIC FIELD ON CATHODE SPOTS MOVEMENT IN ARC ION PLATING

2010 ◽  
Vol 46 (3) ◽  
pp. 372-379 ◽  
Author(s):  
Wenchang LANG ◽  
Jinquan XIAO ◽  
Jun GONG ◽  
Chao SUN ◽  
Rongfang HUNG ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Arc Ion Plating ◽  
Ion Plating

TiN films deposition inside stainless-steel tubes using magnetic field-enhanced arc ion plating

Vacuum ◽  
2015 ◽  
Vol 112 ◽  
pp. 46-54 ◽  
Author(s):  
Yanhui Zhao ◽  
Chaoqian Guo ◽  
Wenjin Yang ◽  
Yuqiu Chen ◽  
Baohai Yu
Keyword(s):  
Magnetic Field ◽  
Stainless Steel ◽  
Steel Tubes ◽  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

High temperature protection of NiCrAlSiY/Al–Cr–O coatings deposited by arc ion plating on nickel-based superalloy

Vacuum ◽  
2021 ◽  
pp. 110152
Author(s):  
Lijun Xian ◽  
Haibo Zhao ◽  
Guang Xian ◽  
Chencheng Wang ◽  
Hong He
Keyword(s):  
High Temperature ◽  
Arc Ion Plating ◽  
Ion Plating ◽  
Nickel Based Superalloy
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