Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs
2007 ◽
Vol 275
(1)
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pp. 257-267
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Keyword(s):
2010 ◽
Vol 31
(1)
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pp. 012003
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Keyword(s):
2010 ◽
Vol 27
(6)
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pp. 1204
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