Second-order tilted wave interpretation of the Gouy phase shift under high numerical aperture uniform illumination

2004 ◽  
Vol 242 (4-6) ◽  
pp. 351-360 ◽  
Author(s):  
Qiwen Zhan
Keyword(s):  
Phase Shift ◽  
Numerical Aperture ◽  
Second Order ◽  
Uniform Illumination ◽  
High Numerical Aperture ◽  
Gouy Phase

scholarly journals Formation of an elongated region of energy backflow using ring apertures

2019 ◽  
Vol 43 (2) ◽  
pp. 193-199
Author(s):  
S.S. Stafeev ◽  
V.V. Kotlyar
Keyword(s):  
Energy Flow ◽  
Poynting Vector ◽  
Numerical Aperture ◽  
Second Order ◽  
Depth Of Focus ◽  
Incident Wavelength ◽  
Entrance Pupil ◽  
High Numerical Aperture ◽  
Vector Beam ◽  
Cylindrical Vector Beam

In this paper, we have investigated the focusing of a second-order cylindrical vector beam by using a high numerical aperture (NA) lens limited by a ring aperture using the Richards-Wolf formulae. It was shown that the range of negative on-axis projections of the Poynting vector could be increased by increasing the depth of focus through the use of a ring aperture. It was shown that when focusing light with a lens with NA = 0.95, the use of a ring aperture limiting the entrance pupil angle to 0.9 of maximum, allows the depth of the region of negative on-axis Poynting vector projections to be four times increased, with the region width remaining almost unchanged and varying from 0.357 to 0.352 of the incident wavelength. Notably, the magnitude of the reverse energy flow was found to be larger than the direct one by a factor of 2.5.

Optimal phase shift and reflectance for high numerical aperture EUV phase shift mask

2021 ◽  
Author(s):  
Inhwa Kang ◽  
Jang-Gun Park ◽  
Minwoo Kim ◽  
Jun-Hyeong Lee ◽  
Hye-Keun Oh
Keyword(s):  
Phase Shift ◽  
Numerical Aperture ◽  
High Numerical Aperture ◽  
Phase Shift Mask
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