Two-step post-annealing effects on the shallow-junction characteristics produced by BGe molecular ion implantation

Author(s):  
J.H. Liang ◽  
Y.J. Sang
Author(s):  
Majeed A. Foad ◽  
Roger Webb ◽  
Roger Smith ◽  
Jiro Matsuo ◽  
Amir Al-Bayati ◽  
...  

2014 ◽  
Vol 504 ◽  
pp. 8-11 ◽  
Author(s):  
Takashi Noji ◽  
Takehiro Hatakeda ◽  
Shohei Hosono ◽  
Takayuki Kawamata ◽  
Masatsune Kato ◽  
...  

2015 ◽  
Vol 11 (5) ◽  
pp. 862-870 ◽  
Author(s):  
Faiza Meriche ◽  
Tahar Touam ◽  
Azeddine Chelouche ◽  
Mohamed Dehimi ◽  
Jeanne Solard ◽  
...  

2021 ◽  
Author(s):  
Kazunari Kurita ◽  
Takeshi Kadono ◽  
Ryosuke Okuyama ◽  
Ayumi Onaka-Masada ◽  
Satoshi Shigematsu ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document