Two-step post-annealing effects on the shallow-junction characteristics produced by BGe molecular ion implantation
2006 ◽
Vol 249
(1-2)
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pp. 347-351
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2005 ◽
Vol 237
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pp. 312-317
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2008 ◽
Vol 266
(24)
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pp. 5116-5119
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2000 ◽
Vol 18
(1)
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pp. 445
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2014 ◽
Vol 504
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pp. 8-11
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2015 ◽
Vol 11
(5)
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pp. 862-870
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1997 ◽
Vol 127-128
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pp. 583-586
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