Evaluation of via density and low-k Young's modulus influence on mechanical performance of advanced node multi-level Back-End-Of-Line

2016 ◽  
Vol 56 ◽  
pp. 93-100 ◽  
Author(s):  
Luka Ključar ◽  
Mario González ◽  
Ingrid De Wolf ◽  
Kristof Croes ◽  
Jürgen Bömmels ◽  
...  
Keyword(s):  
Young’S Modulus ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
Multi Level ◽  
Low K

Via Electromigration Lifetime Improvement of Aluminum Dual-Damascene Interconnects by Using Soft Low-k Organic SOG Interlayer Dielectrics

2000 ◽  
Vol 612 ◽  
Author(s):  
Hisashi Kaneko ◽  
Takamasa Usui ◽  
Sachiyo Ito ◽  
Masahiko Hasunuma
Keyword(s):  
Tensile Stress ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Void Nucleation ◽  
Dielectric Materials ◽  
Dual Damascene ◽  
Atom Migration ◽  
Multi Level ◽  
Damascene Interconnects ◽  
Low K

AbstractThe via electromigration(EM) reliability of aluminum(Al) dual-damascene interconnects by using Niobium(Nb) new reflow liner is described. It has been found that the via EM lifetime was improved by introducing low-k organic spin on glass(SOG)-passivated structure than the conventional TEOS-SiO2/SiN-passivated structure. Higher EM activation energy of 1.08 eV was obtained for the SOG-passivated structure than the conventional TEOS-passivated structure of 0.9 eV, even though no significant Al micro-crystal structure difference was found for both structures. It has been turned out that the low-k SOG material has the 1/7 Young's modulus (8 GPa) of TEOS-SiO2 (57 GPa) or thermal SiO2(70 GPa). The small Young's modulus means that SOG is more elastically deformable and/or softer than TEOS or thermal SiO2. This elastic deformation of the low-k SOG could retard the tensile stress evolution due to the Al atom migration near the cathode via, and elongated the time until the Al interconnect tensile stress exceeds the critical stress value for void nucleation. It has been concluded that the small-RC and reliable multi-level Al interconnect can be realized by the Nb-liner reflow-sputtered process with soft and low-k SOG dielectric materials.

Determination of Poisson's Ratio of Thin low-k Films using Bidirectional Thermal Expansion Measurement

2006 ◽  
Vol 914 ◽  
Author(s):  
Jiping Ye ◽  
Satoshi Shimizu ◽  
Shigeo Sato ◽  
Nobuo Kojima ◽  
Junnji Noro
Keyword(s):  
Thermal Expansion ◽  
Temperature Gradient ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Silicon Oxide ◽  
Young's Modulus ◽  
Polymer Materials ◽  
Poisson's Ratio ◽  
Thermal Expansion Measurement ◽  
Low K

AbstractA recently developed bidirectional thermal expansion measurement (BTEM) method was applied to different types of low-k films to substantiate the reliability of the Poisson's ratio found with this technique and thereby to corroborate its practical utility. In this work, the Poisson's ratio was determined by obtaining the temperature gradient of the biaxial thermal stress from substrate curvature measurements, the temperature gradient of the whole thermal expansion strain along the film thickness from x-ray reflectivity (XRR) measurements, and reduced modulus of the film from nanoindentation measurements. For silicon oxide-based SiOC film having a thickness of 382.5 nm, the Poisson's ratio, Young's modulus and thermal extension coefficient (TEC) were determined to be Vf = 0.26, αf =21 ppm/K and Ef =9,7 GPa. These data are close to the levels of metals and polymers rather than the levels of fused silicon oxide, which is characterized by Vf = 0.17 and Er = 69.6 GPa. The alkyl component in the silicon oxide-based framework is thought to act as an agent in reducing the modulus and elevating the Poisson's ratio in SiOC low-k materials. In the case of an organic polymer SiLK film with a thickness of 501.5 nm, the Poisson's ratio, Young's modulus and TEC were determined to be Vf = 0.39, αf =74 ppm/K and Er =3.1 GPa, which are in the typical range of V= 0.34~0.47 with E =1.0~10 GPa for polymer materials. From the viewpoint of the relationship between the Poisson's ratio and Young's modulus as classified by different material types, the Poisson's ratios found for the silicon oxide-based SiOC and organic SiLK films are reasonable values, thereby confirming that BTEM is a reliable and effective method for evaluating the Poisson's ratio of thin films.

Indentation Tests for Sintered Silver in Die-Attach Interconnection After Thermal Cycling

2021 ◽  
Author(s):  
Fei Qin ◽  
Shuai Zhao ◽  
Yanwei Dai ◽  
Lingyun Liu ◽  
Tong An ◽  
...  
Keyword(s):  
Thermal Cycling ◽  
Young’S Modulus ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
Silver Layer ◽  
Thermal Cycles ◽  
Nano Indentation ◽  
Die Attach ◽  
Indentation Tests ◽  
Sintered Silver

Abstract Thermo-mechanical reliability assessment for sintered silver is a crucial issue as sintered silver is a promising candidate of die-attachment materials for power devices. In this paper, the nano-indentation tests are performed for sintered silver in typical die-attach interconnection under different thermal cycles. Based on thermal cycling test, the Young's modulus and hardness of sintered silver layer have been presented. It is found that the Young's modulus and hardness of sintered silver layer changes slightly although the microstructure of sintered silver also presents some variations. The stress and strain curves for different thermal cycling tests for sintered silver based on reverse analysis of nano-indentation are also given. The results show that the elastoplastic constitutive equations change significantly after thermal cycling tests, and the yielding stress decreases remarkably after 70 thermal cycles. The experimental investigation also show that the cracking behaviors of sintered silver depends on its geometry characteristics, which implies that the possible optimization of sintered silver layer could enhance its thermo-mechanical performance.

scholarly journals Kinetics of Capability Aging in Ti-13Nb-13Zr Alloy

Crystals ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 693 ◽  
Author(s):  
Myoungjae Lee ◽  
In-Su Kim ◽  
Young Hoon Moon ◽  
Hyun Sik Yoon ◽  
Chan Hee Park ◽  
...  
Keyword(s):  
Mechanical Strength ◽  
Young’S Modulus ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
Solution Treatment ◽  
High Strength ◽  
Biomedical Implant ◽  
13Zr Alloy ◽  
American Society ◽  
Kinetics Of

Metals for biomedical implant applications require a simultaneous achievement of high strength and low Young’s modulus from the viewpoints of mechanical properties. The American Society for Testing and Materials (ASTM) standards suggest two types of processing methods to confer such a mechanical performance to Ti-13Nb-13Zr alloy: solution treatment (ST) and capability aging (CA). This study elucidated the kinetics of CA process in Ti-13Nb-13Zr alloy. Microstructural evolution and mechanical change were investigated depending on the CA duration from 10 min to 6 h. The initial ST alloy possessed the full α′-martensitic structure, leading to a low strength, low Young’s modulus, and high ductility. Increasing CA duration increased mechanical strength and Young’s modulus in exchange for the reduction of ductility. Such a tendency is attributed to the decomposition of α′ martensite into (α+β) structure, particularly hard α precipitates. Mechanical compatibility (i.e., Young’s modulus compensated with a mechanical strength) of Ti-13Nb-13Zr alloy rarely increased by changing CA duration, suggestive of the intrinsic limit of static heat treatment.

Graphene oxide and zinc oxide decorated chitosan nanocomposite biofilms for packaging applications

2020 ◽  
Vol 40 (2) ◽  
pp. 152-157 ◽  
Author(s):  
Pınar Terzioglu ◽  
Yasin Altin ◽  
Ayse Kalemtas ◽  
Ayse Celik Bedeloglu
Keyword(s):  
Tensile Strength ◽  
Zinc Oxide ◽  
Graphene Oxide ◽  
Composite Film ◽  
Young’S Modulus ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
Chitosan Film ◽  
Oxide Composite ◽  
Wide Range

AbstractRecently, due to sustainable development and environmental protection policies, there is increasing interest in the development of new biodegradable polymer-based multifunctional composites. Chitosan is one of the most remarkable and preferred biopolymers, which is environmentally friendly as well as renewable, biocompatible, and inexpensive. Though it has a wide range of potential applications, the major limitation of chitosan – the problem of poor mechanical performance – needs to be solved. In this work, graphene oxide was first produced and then used to manufacture a chitosan/graphene oxide/zinc oxide composite film through a casting method. The properties of the chitosan film and the chitosan/graphene oxide/zinc oxide composite film were investigated using Fourier transform infrared spectroscopy, mechanical, thermal gravimetric, and ultraviolet (UV)-visible spectroscopy analyses. The results showed that the incorporation of graphene oxide and zinc oxide into the chitosan matrix resulted in enhanced mechanical properties and thermal stability of chitosan biocomposite films. The graphene oxide- and zinc oxide-reinforced chitosan film showed 2527 MPa and 55.72 MPa of Young’s modulus and tensile strength, respectively, while neat chitosan showed only 1549 MPa and 37.91 MPa of Young’s modulus and tensile strength, respectively. Conversely, the addition of graphene oxide decreased the transmittance, notably in the UV region.

Achieving consistency of Young’s modulus determination from nanoscale deformation of low-k films

2009 ◽  
Vol 105 (10) ◽  
pp. 106104 ◽  
Author(s):  
S. Nagao ◽  
M. Fujikane ◽  
N. Tymiak ◽  
R. Nowak
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Low K

Young’s modulus evaluation by SAWs for porous silica low-k film with cesium doping

2011 ◽  
Vol 88 (5) ◽  
pp. 666-670 ◽  
Author(s):  
X. Xiao ◽  
X.M. Shan ◽  
Y. Kayaba ◽  
K. Kohmura ◽  
H. Tanaka ◽  
...  
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Porous Silica ◽  
Low K

Evaluation of Mechanical Properties of Regenerated Bone by Nanoindentation Technique

2010 ◽  
Vol 654-656 ◽  
pp. 2220-2224 ◽  
Author(s):  
Takuya Ishimoto ◽  
Takayoshi Nakano
Keyword(s):  
Mechanical Properties ◽  
Young’S Modulus ◽  
Bone Tissue ◽  
Material Properties ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
Mechanical Tests ◽  
Long Bone ◽  
Nanoindentation Technique ◽  
Intact Bone

To evaluate the material parameters of regenerated bone, it is important to clarify the mechanical performance of the regenerated portion. In general, the shape and size of regenerated bone tissue is heterogeneous. It is often difficult to elucidate material properties by means of conventional mechanical tests such as compressive and/or tensile tests and bending tests. The nanoindentation technique has been utilized to evaluate the material properties of small or microstructured materials because they do not necessarily require a large well-designed specimen. Thus, this technique may be useful for the evaluation of the material properties of regenerated bone tissue. In this study, this technique was applied for the assessment of the Young’s modulus and hardness of regenerated and intact long bones of a rabbit. The regenerated bone exhibited a significantly lower Young’s modulus and hardness than the intact bone. The regenerated long bone also exhibited impaired mechanical properties, which may have been caused by the difference in the nano-organization of its collagen fibers and mineral crystals (the main components of bone tissue), from that of the intact bone.

Mechanical Properties of Hydrogen Functionalized Graphyne - A Molecular Dynamics Investigation

2012 ◽  
Vol 472-475 ◽  
pp. 1813-1817 ◽  
Author(s):  
Yu Lin Yang ◽  
Zhe Yong Fan ◽  
Ning Wei ◽  
Yong Ping Zheng
Keyword(s):  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Young’S Modulus ◽  
Mechanical Performance ◽  
Young's Modulus ◽  
High Strength ◽  
Strength And Stiffness ◽  
Dynamics Simulations ◽  
Structure Engineering

In this paper the mechanical properties of a series of hydrogen functionalized graphyne are investigated through acting tensile loads on the monolayer networks. Molecular dynamics simulations are performed to calculate the fracture strains and corresponding maximum forces for pristine graphyne along both armchair and zigzag directions. Furthermore, hydrogen functionalized graphynes with different functionalization sites are analyzed to investigate the effect of functionlization on the mechanical performance. Finally, Young's modulus of all the investigated architectures are computed. The obtained results show that monolayer graphyne is mechanically stable with high strength and stiffness, and the mechanical performance can be tuned through structure engineering and functionalization.

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