Impact of substrate resistance and layout on passivation etch-induced wafer arcing and reliability
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2010 ◽
Vol 348
(1-2)
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pp. 28-33
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2003 ◽
Vol 38
(4)
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pp. 669-672
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2001 ◽
Vol 48
(2)
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pp. 397-399
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1997 ◽
Vol 48
(1)
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pp. 76-81
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