Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films

Shou-Yi Kuo; Kou-Chen Liu; Fang-I Lai; Jui-Fu Yang; Wei-Chun Chen; Ming-Yang Hsieh; Hsin-I Lin; Woei-Tyng Lin

doi:10.1016/j.microrel.2010.01.042

Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films

Microelectronics Reliability ◽

10.1016/j.microrel.2010.01.042 ◽

2010 ◽

Vol 50 (5) ◽

pp. 730-733 ◽

Cited By ~ 56

Author(s):

Shou-Yi Kuo ◽

Kou-Chen Liu ◽

Fang-I Lai ◽

Jui-Fu Yang ◽

Wei-Chun Chen ◽

...

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Rf Power ◽

Zinc Oxide Films

Download Full-text

Optimization of the optical and electrical properties of electron beam evaporated aluminum-doped zinc oxide films for opto-electronic applications

Journal of Physics and Chemistry of Solids ◽

10.1016/j.jpcs.2006.04.005 ◽

2006 ◽

Vol 67 (8) ◽

pp. 1823-1829 ◽

Cited By ~ 43

Author(s):

H.M. Ali ◽

M.M. Abd El-Raheem ◽

N.M. Megahed ◽

H.A. Mohamed

Keyword(s):

Zinc Oxide ◽

Electron Beam ◽

Electrical Properties ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

Download Full-text

Studies on structural, optical and electrical properties of boron doped zinc oxide films prepared by spray pyrolysis technique

Physica B Condensed Matter ◽

10.1016/s0921-4526(01)00405-7 ◽

2001 ◽

Vol 302-303 ◽

pp. 59-63 ◽

Cited By ~ 71

Author(s):

B.J Lokhande ◽

P.S Patil ◽

M.D Uplane

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Spray Pyrolysis ◽

Spray Pyrolysis Technique ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Zinc Oxide Films ◽

Boron Doped

Download Full-text

Effect of an Ag Insertion Layer on the Optical and Electrical Properties of Ga Doped Zinc Oxide Films

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2015.10240 ◽

2015 ◽

Vol 15 (3) ◽

pp. 2478-2481 ◽

Cited By ~ 2

Author(s):

Min Young Kim ◽

Kyung Tae Son ◽

Donggun Lim

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Zinc Oxide Films

Download Full-text

Improvement in the optical and electrical properties of Ga-doped zinc-oxide films by using nano-imprinted pattern arrays and post-annealing

Journal of the Korean Physical Society ◽

10.3938/jkps.66.246 ◽

2015 ◽

Vol 66 (2) ◽

pp. 246-251 ◽

Cited By ~ 2

Author(s):

Su Yeon Lee ◽

Seong Eui Lee ◽

Hee Chul Lee ◽

Ho Nyun Lee ◽

Hyun Jong Kim

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Zinc Oxide Films ◽

Post Annealing

Download Full-text

Effects of rf power on surface-morphological, structural and electrical properties of aluminium-doped zinc oxide films by magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2007.12.061 ◽

2008 ◽

Vol 254 (13) ◽

pp. 4171-4178 ◽

Cited By ~ 80

Author(s):

Dengyuan Song

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Oxide Films ◽

Rf Power ◽

Zinc Oxide Films ◽

Structural And Electrical Properties

Download Full-text

The role of DUV laser irradiation in the optical and electrical properties of indium zinc oxide films synthesized by self-combustion

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2019.07.171 ◽

2019 ◽

Vol 806 ◽

pp. 327-334 ◽

Cited By ~ 2

Author(s):

Peng Li ◽

Jun Duan ◽

Jiangang Ma ◽

Tingfeng Wang ◽

Haiyang Xu ◽

...

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Laser Irradiation ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Zinc Oxide Films ◽

Indium Zinc Oxide

Download Full-text

Effects of hydrogen annealing on the structural, optical and electrical properties of indium-doped zinc oxide films

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-009-0050-x ◽

2010 ◽

Vol 21 (11) ◽

pp. 1221-1227 ◽

Cited By ~ 15

Author(s):

Changgang Huang ◽

Meili Wang ◽

Zhonghua Deng ◽

Yongge Cao ◽

Quanlin Liu ◽

...

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Hydrogen Annealing ◽

Zinc Oxide Films

Download Full-text

Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(97)00288-3 ◽

1997 ◽

Vol 218 ◽

pp. 74-80 ◽

Cited By ~ 49

Author(s):

B. Szyszka ◽

S. Jäger

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Oxide Films ◽

Reactive Magnetron Sputtering ◽

Optical And Electrical Properties ◽

Reactive Magnetron ◽

Zinc Oxide Films

Download Full-text

Optical and electrical properties of nanocrystal zinc oxide films prepared by dc magnetron sputtering at different sputtering pressures

Applied Surface Science ◽

10.1016/j.apsusc.2010.03.059 ◽

2010 ◽

Vol 256 (16) ◽

pp. 5056-5060 ◽

Cited By ~ 11

Author(s):

Atanas Tanuševski ◽

Verka Georgieva

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering ◽

Zinc Oxide Films

Download Full-text

Effect on structural, optical and electrical properties of aluminum-doped zinc oxide films using diode laser annealing

Optics & Laser Technology ◽

10.1016/j.optlastec.2014.11.009 ◽

2015 ◽

Vol 68 ◽

pp. 41-47 ◽

Cited By ~ 10

Author(s):

Wen-Tse Hsiao ◽

Shih-Feng Tseng ◽

Chien-Kai Chung ◽

Donyau Chiang ◽

Kuo-Cheng Huang ◽

...

Keyword(s):

Zinc Oxide ◽

Electrical Properties ◽

Diode Laser ◽

Laser Annealing ◽

Oxide Films ◽

Optical And Electrical Properties ◽

Zinc Oxide Films ◽

Aluminum Doped Zinc Oxide

Download Full-text