Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H–SiC devices

2006 ◽  
Vol 46 (5-6) ◽  
pp. 743-755 ◽  
Author(s):  
Maciej Wolborski ◽  
Mietek Bakowski ◽  
Armando Ortiz ◽  
Viljami Pore ◽  
Adolf Schöner ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Spray Pyrolysis ◽  
Ultrasonic Spray Pyrolysis ◽  
Atomic Layer ◽  
Ultrasonic Spray ◽  
Layer Deposition ◽  
Al2o3 Films

Substrate dependence on the optical properties of Al2O3 films grown by atomic layer deposition

1997 ◽  
Vol 71 (25) ◽  
pp. 3604-3606 ◽  
Author(s):  
Y. Kim ◽  
S. M. Lee ◽  
C. S. Park ◽  
S. I. Lee ◽  
M. Y. Lee
Keyword(s):  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Substrate Dependence ◽  
Al2o3 Films

scholarly journals Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition

2019 ◽  
Vol 34 (10) ◽  
pp. 105004
Author(s):  
Pengfei Ma ◽  
Wenhao Guo ◽  
Jiamin Sun ◽  
Jiacheng Gao ◽  
Guanqun Zhang ◽  
...  
Keyword(s):  
Electron Transport ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Transport Mechanism ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Al2o3 Films

Perfectly Conformal TiN and Al2O3 Films Deposited by Atomic Layer Deposition

1999 ◽  
Vol 5 (1) ◽  
pp. 7-9 ◽  
Author(s):  
Mikko Ritala ◽  
Markku Leskelä ◽  
Jan-Pieter Dekker ◽  
Cees Mutsaers ◽  
Pekka J. Soininen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Al2o3 Films
Sign in / Sign up

Export Citation Format

Share Document