Effect of retaining ring slot designs and polishing conditions on slurry flow dynamics at bow wave

2012 ◽  
Vol 98 ◽  
pp. 70-73 ◽  
Author(s):  
X. Liao ◽  
Y. Sampurno ◽  
Y. Zhuang ◽  
A. Rice ◽  
F. Sudargho ◽  
...  
2016 ◽  
Vol 1136 ◽  
pp. 338-342
Author(s):  
Chao Li ◽  
Ping Zhou ◽  
Zhu Ji Jin ◽  
Bi Zhang ◽  
Shuang Ji Shi

Retaining ring which keeps the wafer in place is an essential component in chemical mechanical polishing. Meanwhile, it helps to reduce the edge exclusion region where the material removal rate deviates significantly from that of the central region of the wafer. However, it may increase the slurry flow resistance and hence decrease the slurry flow rate. For properly designing a retaining ring of reasonable structure, the effects of retaining ring on slurry flow and contact pressure distribution in CMP process are analyzed by the mixed elastohydrodynamic lubrication model. It is found that the slurry flow is sensitive to the protrusion height of retaining ring used in the first generation carrier. The same as the first generation carrier, the slurry flow is obviously reduced with increasing pressure acting on the retaining ring in the second generation carrier. In addition, the floating retaining ring used in the second generation CMP carrier has better performance and is more controllable than the fixed retaining ring used in the first generation CMP carrier.


2018 ◽  
Vol 7 (5) ◽  
pp. P253-P259 ◽  
Author(s):  
Leticia Vazquez Bengochea ◽  
Yasa Sampurno ◽  
Calliandra Stuffle ◽  
Fransisca Sudargho ◽  
Ruochen Han ◽  
...  

2007 ◽  
Vol 55 (S 1) ◽  
Author(s):  
F Schoenhoff ◽  
C Loupatatzis ◽  
FS Eckstein ◽  
C Stoupis ◽  
FF Immer ◽  
...  

1978 ◽  
Vol 35 (1) ◽  
pp. 823-827 ◽  
Author(s):  
O. N. Ovchinnikov ◽  
E. M. Smirnov

1959 ◽  
Vol 63 (585) ◽  
pp. 508-512 ◽  
Author(s):  
K. W. Mangler

When a body moves through air at very high speed at such a height that the air can be considered as a continuum, the distinction between sharp and blunt noses with their attached or detached bow shocks loses its significance, since, in practical cases, the bow wave is always detached and fairly strong. In practice, all bodies behave as blunt shapes with a smaller or larger subsonic region near the nose where the entropy and the corresponding loss of total head change from streamline to streamline due to the curvature of the bow shock. These entropy gradients determine the behaviour of the hypersonic flow fields to a large extent. Even in regions where viscosity effects are small they give rise to gradients of the velocity and shear layers with a lower velocity and a higher entropy near the surface than would occur in their absence. Thus one can expect to gain some relief in the heating problems arising on the surface of the body. On the other hand, one would lose farther downstream on long slender shapes as more and more air of lower entropy is entrained into the boundary layer so that the heat transfer to the surface goes up again. Both these flow regions will be discussed here for the simple case of a body of axial symmetry at zero incidence. Finally, some remarks on the flow field past a lifting body will be made. Recently, a great deal of information on these subjects has appeared in a number of reviewing papers so that little can be added. The numerical results on the subsonic flow regions in Section 2 have not been published before.


Sign in / Sign up

Export Citation Format

Share Document