Reflow of supported sub-100 nm polymer films as a characterization process for NanoImprint lithography
2011 ◽
Vol 88
(8)
◽
pp. 1867-1870
◽
Keyword(s):
2017 ◽
Vol 24
(1)
◽
pp. 389-395
◽
2011 ◽
Vol 29
(6)
◽
pp. 061603
◽
Keyword(s):