Development of an experimental technique for testing rheological properties of ultrathin polymer films used in nanoimprint lithography
2011 ◽
Vol 29
(6)
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pp. 061603
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2005 ◽
Vol 78
(3)
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pp. 371-382
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2014 ◽
Vol 24
(30)
◽
pp. 4728-4728
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Keyword(s):
Keyword(s):