High aspect ratio micro/nano machining with proton beam writing on aqueous developable – easily stripped negative chemically-amplified resists

2008 ◽  
Vol 85 (5-6) ◽  
pp. 945-948 ◽  
Author(s):  
M. Chatzichristidi ◽  
E. Valamontes ◽  
P. Argitis ◽  
I. Raptis ◽  
J.A. van Kan ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Proton Beam ◽  
High Aspect Ratio ◽  
Chemically Amplified ◽  
Proton Beam Writing ◽  
Chemically Amplified Resists

Electroplating using high-aspect-ratio microstructures fabricated by proton beam writing

2009 ◽  
Vol 86 (4-6) ◽  
pp. 945-948 ◽  
Author(s):  
Y. Seki ◽  
Y. Furuta ◽  
H. Nishikawa ◽  
T. Watanabe ◽  
T. Nakata ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Proton Beam ◽  
High Aspect Ratio ◽  
Proton Beam Writing

Realization and Simulation of High-Aspect-Ratio Micro/Nanostructures by Proton Beam Writing

2008 ◽  
Vol 47 (11) ◽  
pp. 8600-8605 ◽  
Author(s):  
Evangelos Valamontes ◽  
Margarita Chatzichristidi ◽  
Nikolaos Tsikrikas ◽  
Dimitrios Goustouridis ◽  
Ioannis Raptis ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Proton Beam ◽  
High Aspect Ratio ◽  
Proton Beam Writing

Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

2009 ◽  
Vol 267 (14) ◽  
pp. 2376-2380 ◽  
Author(s):  
Weisheng Yue ◽  
Yaping Ren ◽  
Jeroen Anton van Kan ◽  
Sher-Yi Chiam ◽  
Linke Jian ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Proton Beam ◽  
High Aspect Ratio ◽  
Proton Beam Writing

Proton beam writing: a tool for high-aspect ratio mask production

2006 ◽  
Vol 13 (5-6) ◽  
pp. 431-434 ◽  
Author(s):  
J. A. van Kan ◽  
P. G. Shao ◽  
K. Ansari ◽  
A. A. Bettiol ◽  
T. Osipowicz ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Proton Beam ◽  
High Aspect Ratio ◽  
Proton Beam Writing

Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

2011 ◽  
Vol 88 (8) ◽  
pp. 2145-2148 ◽  
Author(s):  
Yusuke Tanabe ◽  
Hiroyuki Nishikawa ◽  
Yoshihiro Seki ◽  
Takahiro Satoh ◽  
Yasuyuki Ishii ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Proton Beam ◽  
High Aspect Ratio ◽  
Imprint Lithography ◽  
Proton Beam Writing
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