0.6nm-EOT high-k gate stacks with HfSiOx interfacial layer grown by solid-phase reaction between HfO2 and Si substrate

2007 ◽  
Vol 84 (9-10) ◽  
pp. 1861-1864 ◽  
Author(s):  
A. Ogawa ◽  
K. Iwamoto ◽  
H. Ota ◽  
Y. Morita ◽  
M. Ikeda ◽  
...  
Keyword(s):  
Interfacial Layer ◽  
Solid Phase ◽  
Solid Phase Reaction ◽  
Phase Reaction ◽  
Gate Stacks ◽  
Si Substrate ◽  
High K

Thickness Dependent Phase Formation in Fe Thin Film and Si Substrate Solid Phase Reaction

1995 ◽  
Vol 402 ◽  
Author(s):  
G Y. Molnár ◽  
G. Pető ◽  
E. Zsoldos ◽  
Z. E. Horváth ◽  
N. Q. Khánh
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Phase Formation ◽  
Solid Phase ◽  
Iron Film ◽  
Solid Phase Reaction ◽  
Phase Reaction ◽  
Si Substrate ◽  
Transmission Electron ◽  
Initial Iron

AbstractThe solid phase reaction of Fe thin films with (111) Si substrate was investigated at constant annealing temperature and time (700°C, 7 minutes) as a function of the initial iron film thickness (from 5 nm to 27.5 um in 2.5 nm steps). The formed phases were analysed by X-ray diffraction, Rutherford backscattering and transmission electron microscopy and optical microscopy.After annealing FeSi phase was detected in the thinner samples. Samples with Fe layers thicker than 12.5 nm contained a β-FeSi2 phase. This special phase sequence was explained with the help of a nucleation controlled phase formation model, taking into consideration the critical radius of nuclei of the new phase. The advantages of using the film thickness as a variable during investigation of solid phase thin film reactions and the probable substrate effects are also discussed.

Solid phase reaction in Ti(thin film)/Si(substrate) with Mo interlayer: SXES and PEEM study

2004 ◽  
Vol 464-465 ◽  
pp. 107-111 ◽  
Author(s):  
J. Labis ◽  
H. Namatame ◽  
M. Taniguchi ◽  
C. Kamezawa ◽  
M. Hirai ◽  
...  
Keyword(s):  
Thin Film ◽  
Solid Phase ◽  
Solid Phase Reaction ◽  
Phase Reaction ◽  
Si Substrate

scholarly journals Fe3O4@C Nanoparticles Synthesized by In Situ Solid-Phase Method for Removal of Methylene Blue

Nanomaterials ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 330
Author(s):  
Hengli Xiang ◽  
Genkuan Ren ◽  
Yanjun Zhong ◽  
Dehua Xu ◽  
Zhiye Zhang ◽  
...  
Keyword(s):  
Methylene Blue ◽  
Solid Phase ◽  
Raw Materials ◽  
Phase Method ◽  
Maximum Adsorption Capacity ◽  
High Catalytic Activity ◽  
Solid Phase Reaction ◽  
Phase Reaction ◽  
High Concentrations

Fe3O4@C nanoparticles were prepared by an in situ, solid-phase reaction, without any precursor, using FeSO4, FeS2, and PVP K30 as raw materials. The nanoparticles were utilized to decolorize high concentrations methylene blue (MB). The results indicated that the maximum adsorption capacity of the Fe3O4@C nanoparticles was 18.52 mg/g, and that the adsorption process was exothermic. Additionally, by employing H2O2 as the initiator of a Fenton-like reaction, the removal efficiency of 100 mg/L MB reached ~99% with Fe3O4@C nanoparticles, while that of MB was only ~34% using pure Fe3O4 nanoparticles. The mechanism of H2O2 activated on the Fe3O4@C nanoparticles and the possible degradation pathways of MB are discussed. The Fe3O4@C nanoparticles retained high catalytic activity after five usage cycles. This work describes a facile method for producing Fe3O4@C nanoparticles with excellent catalytic reactivity, and therefore, represents a promising approach for the industrial production of Fe3O4@C nanoparticles for the treatment of high concentrations of dyes in wastewater.

Microstructure and Mechanical Properties of ZrB2/h-BN Multiphase Ceramics by Low-Temperature Reactive Sintering

2016 ◽  
Vol 697 ◽  
pp. 510-514 ◽  
Author(s):  
Feng Rui Zhai ◽  
Ke Shan ◽  
Ruo Meng Xu ◽  
Min Lu ◽  
Zhong Zhou Yi ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Relative Density ◽  
Fracture Strength ◽  
Solid Phase ◽  
Raw Materials ◽  
Solid Phase Reaction ◽  
Phase Reaction ◽  
Microstructure And Mechanical Properties ◽  
Multiphase Ceramics ◽  
Strength And Toughness

In the present paper, the ZrB2/h-BN multiphase ceramics were fabricated by SPS (spark plasma sintering) technology at lower sintering temperature using h-BN, ZrO2, AlN and Si as raw materials and B2O3 as a sintering aid. The phase constitution and microstructure of specimens were analyzed by XRD and SEM. Moreover, the effects of different sintering pressures on the densification, microstructure and mechanical properties of ZrB2/h-BN multiphase ceramics were also systematically investigated. The results show that the ZrB2 was obtained through solid phase reaction at different sintering pressures, and increasing sintering pressure could accelerate the formation of ZrB2 phase. As the sintering pressure increasing, the fracture strength and toughness of the sintered samples had a similar increasing tendency as the relative density. The better comprehensive properties were obtained at given sintering pressure of 50MPa, and the relative density, fracture strength and toughness reached about 93.4%, 321MPa and 3.3MPa·m1/2, respectively. The SEM analysis shows that the h-BN grains were fine and uniform, and the effect of sintering pressure on grain size was inconspicuous. The distribution of grain is random cross array, and the fracture texture was more obvious with the increase of sintering pressure. The fracture mode of sintered samples remained intergranular fracture mechanism as sintering pressure changed, and the grain refinement, grain pullout and crack deflection helped to increase the mechanical properties.

Study of solid-phase reaction between CsNO3 AND V2O5 in the molar ratio 6:5

1980 ◽  
Vol 18 (3) ◽  
pp. 469-476 ◽  
Author(s):  
Ľ. Žúrková ◽  
K. Gáplovská ◽  
V. Suchá
Keyword(s):  
Solid Phase ◽  
Molar Ratio ◽  
Solid Phase Reaction ◽  
Phase Reaction

X-Ray and Magnetic Measurements of TmFeTi2O7

2014 ◽  
Vol 215 ◽  
pp. 470-473 ◽  
Author(s):  
Tamara V. Drokina ◽  
German A. Petrakovskii ◽  
Dmitrii A. Velikanov ◽  
Maksim S. Molokeev
Keyword(s):  
Spin Glass ◽  
Solid Phase ◽  
Magnetic Measurements ◽  
Diffraction Method ◽  
Freezing Temperature ◽  
Solid Phase Reaction ◽  
Phase Reaction ◽  
X Ray Diffraction ◽  
X Ray ◽  
History Of

In this paper we are reported about a peculiarity of the crystal structure and the magnetic state of TmFeTi2O7. The compound TmFeTi2O7 has been synthesizedusing the solid-phase reaction method. Using X-ray diffraction method the disorder in the distribution of the iron ions over five nonequivalent crystal sites was observed, also the populations of the iron atoms positions were determined. We show that below Tf = 6 K the magnetization of TmFeTi2O7 depends on the magnetic history of the sample. There are indications for spin glass state. This results allow us to assume the state of spin glass is realized below freezing temperature Tf = 6 K in TmFeTi2O7.

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