Evaluation of electrical and optical properties of indium tin oxide thin film using chemical mechanical polishing technique

2007 ◽  
Vol 84 (12) ◽  
pp. 2896-2900 ◽  
Author(s):  
Yong-Jin Seo ◽  
Gwon-Woo Choi ◽  
Woo-Sun Lee
1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 7057-7060 ◽  
Author(s):  
Meiso Yokoyama ◽  
Jiin Wen Li ◽  
Shui Hsiang Su ◽  
Yan Kuin Su

2011 ◽  
Vol 25 (20) ◽  
pp. 2741-2749 ◽  
Author(s):  
J. C. ZHOU ◽  
L. LI ◽  
L. Y. RONG ◽  
B. X. ZHAO ◽  
Y. M. CHEN ◽  
...  

High transparency and conductivity of transparent conducting oxide thin film are very important for improving the efficiency of solar cells. ZnO thin film is a better candidate for transparent conductive layer of solar cell. N-type ZnO thin films were prepared by radio-frequency magnetron sputtering on glass substrates. ZnO thin films underwent annealing treatment after deposition. The influence of the sputtering power on the surface morphology, the electrical and optical properties were studied by AFM, XRD, UV2450 and HMS-3000. The experimental results indicate that the crystal quality of ZnO thin film is improved and all films show higher c-axis orientation with increasing sputtering power from 50 to 125 W. The average transparency of ZnO thin films is higher than 90% in the range of 400–900 nm between the sputtering power of 50–100 W. After the rapid thermal annealing at 550°C for 300 s under N2 ambient, the minimum resistivity reach to 10-2Ω⋅ cm .


2017 ◽  
Vol 56 (28) ◽  
pp. 7774 ◽  
Author(s):  
Harry Anderson Rivera Tito ◽  
Anne Habermehl ◽  
Christian Müller ◽  
Sebastian Beck ◽  
Carlos Romero Nieto ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document