Abnormal metal oxide formation induced by residual charging in plasma etch process

2007 ◽  
Vol 84 (1) ◽  
pp. 1-6
Author(s):  
T.F. Yen ◽  
O. Liang ◽  
C.-W. Lu ◽  
K.-F. Chiu
Keyword(s):  
Metal Oxide ◽  
Oxide Formation ◽  
Plasma Etch

Routes of metal oxide formation from metal β-diketonates used as CVD precursors

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-65-Pr8-72 ◽  
Author(s):  
A. E. Turgambaeva ◽  
V. V. Krisyuk ◽  
A. F. Bykov ◽  
I. K. Igumenov
Keyword(s):  
Metal Oxide ◽  
Oxide Formation

Solvent mediated inclusion of metal oxide into block copolymer nanopatterns: Mechanism of oxide formation under UV-Ozone treatment

Polymer ◽  
2019 ◽  
Vol 173 ◽  
pp. 197-204 ◽  
Author(s):  
Tandra Ghoshal ◽  
John O'Connell ◽  
Christophe Sinturel ◽  
Pascal Andreazza ◽  
Justin D. Holmes ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Metal Oxide ◽  
Ozone Treatment ◽  
Oxide Formation ◽  
Uv Ozone

Metal oxide formation by serine and cysteine proteases

2009 ◽  
Vol 19 (44) ◽  
pp. 8299 ◽  
Author(s):  
Gregory P. Smith ◽  
Kelly J. Baustian ◽  
Christopher J. Ackerson ◽  
Daniel L. Feldheim
Keyword(s):  
Metal Oxide ◽  
Cysteine Proteases ◽  
Oxide Formation

ELECTROLYTIC REDUCTION AND ELLINGHAM DIAGRAMS FOR OXY-ANION SYSTEMS

1966 ◽  
Vol 44 (18) ◽  
pp. 2119-2129 ◽  
Author(s):  
H. E. Bartlftt ◽  
K. E. Johnson
Keyword(s):  
Metal Oxide ◽  
Metal Deposition ◽  
Electrolytic Reduction ◽  
Experimental Results ◽  
Oxide Formation ◽  
Decomposition Products ◽  
Decomposition Reactions ◽  
Thermal Data ◽  
Ellingham Diagram ◽  
Nitrogen Evolution

Standard reversible decomposition voltages, E0, for various decomposition reactions of K2CO3, Na2CO3, Li2CO3, BaCO3, CaCO3, MgCO3, Na2SO4, NaNO3, and KNO3 are calculated from thermal data and the values obtained plotted against temperature. That reaction which has the lowest values of E0 is considered to be the most likely to occur when the particular salt is electrolyzed. The results obtained indicate that in the case of the carbonates metal deposition is possible only for K2CO2 and Na2CO3 above 870 °K. In all other cases metal oxide and carbon (or CO at higher temperatures) are the favored cathode products. For Na2SO4, Na2S and Na2O are the favored cathode products and for the nitrates, nitrite and oxide or nitrogen evolution and oxide formation appear equally feasible thermodynamically.Once the likely electrolytic decomposition products are known, a method is presented whereby the products formed by reduction of the oxy-anions by metals (and in the case of the carbonates, by carbon) may be predicted. This method involves drawing an appropriate redox line on an Ellingham diagram. Finally, a comparison is made between the thermodynamic predictions and the few experimental results available.

Metal–metal and metal–oxide interaction effects on thin film oxide formation: the Ti/TiO2 and TiO2/Ti cases

2003 ◽  
Vol 211 (1-4) ◽  
pp. 236-243 ◽  
Author(s):  
S.M Mendoza ◽  
L.I Vergara ◽  
M.C.G Passeggi ◽  
J Ferrón
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Interaction Effects ◽  
Oxide Formation ◽  
Metal Metal

scholarly journals In-situlaser synthesis of Nd–Al–O coatings: the role of sublattice cations in eutectic formation

2015 ◽  
Vol 71 (1) ◽  
pp. 95-111 ◽  
Author(s):  
Isabel de Francisco ◽  
Jose Antonio Bea ◽  
Angel Vegas ◽  
Juan Bautista Carda ◽  
German Francisco de la Fuente
Keyword(s):  
Phase Composition ◽  
Metal Oxide ◽  
Composite Coating ◽  
Driving Force ◽  
Zone Melting ◽  
Oxide Formation ◽  
Eutectic Formation

Neodymium aluminate coatings have been preparedin-situby the laser zone melting (LZM) method, using a CO2SLAB-type laser emitting at 10.6 µm. Polycrystalline Al2O3commercial plates have been used as substrates, and coatings were prepared from the corresponding mixtures of powdered neodymium and aluminium oxides as starting materials. Microstructure, studied by SEM and phase composition, studied by XRD, proved thein-situformation of a NdAlO3/NdAl11O18eutectic. As a result, a well integrated composite coating was formed. Nanoindentation tests are consistent with excellent integration between coating and substrate. Structural similarities between the eutectic components within the coating, as well as between these and the substrate, are consistent with the crystallographic concepts proposed by Vegas (Ramos-Gallardo & Vegas, 1997), where cation sub-arrays play an important role governing metal oxide structures. These structure sublattices are suggested as the driving force behind eutectic oxide formation.

Sign in / Sign up

Export Citation Format

Share Document