Aspect ratio dependent plasma polymer deposition of fluorocarbons

2006 ◽  
Vol 83 (4-9) ◽  
pp. 1174-1177 ◽  
Author(s):  
B.E. Volland ◽  
I.W. Rangelow
Keyword(s):  
Aspect Ratio ◽  
Plasma Polymer ◽  
Polymer Deposition ◽  
Ratio Dependent

Modeling of Aspect Ratio Dependent Etching in an Inductively Coupled Plasma

1995 ◽  
Vol 389 ◽  
Author(s):  
J.S. Han ◽  
J.P. McVittie
Keyword(s):  
Aspect Ratio ◽  
Inductively Coupled Plasma ◽  
Saturation Model ◽  
Langmuir Adsorption ◽  
Inductively Coupled ◽  
Aspect Ratios ◽  
Yield Information ◽  
Polymer Deposition ◽  
Ratio Dependent ◽  
The Difference

ABSTRACTSPEEDIE is used to simulate aspect ratio dependent etching of silicon dioxide in an inductively coupled plasma. Overhang test structures and standard via/trench structures are etched in the system under standard processing conditions. Results from the overhang test structure yield information about the ion angular distribution and aid in the development of the model. The simultaneous etching and deposition model includes such effects as ion enhanced polymer deposition, angle dependent polymer sputtering, Langmuir adsorption saturation model, and surface dependent sticking probability. The model is able to capture all the lag trends, defined as the difference in etch rate for different aspect ratios, and profiles accurately.

scholarly journals Comparative Study of Natural Terpenoid Precursors in Reactive Plasmas for Thin Film Deposition

Molecules ◽  
2021 ◽  
Vol 26 (16) ◽  
pp. 4762
Author(s):  
Daniel S. Grant ◽  
Jakaria Ahmed ◽  
Jason D. Whittle ◽  
Andrew Michelmore ◽  
Krasimir Vasilev ◽  
...  
Keyword(s):  
Comparative Study ◽  
Mass Spectra ◽  
Thin Film Deposition ◽  
Eukaryotic Cell ◽  
Film Deposition ◽  
Plasma Polymer ◽  
Melaleuca Alternifolia ◽  
Naturally Occurring ◽  
Polymer Deposition ◽  
Positive Ion

If plasma polymer thin films are to be synthesised from sustainable and natural precursors of chemically heterogeneous composition, it is important to understand the extent to which this composition influences the mechanism of polymerisation. To this end, a well-studied monoterpene alcohol, terpinen-4-ol, has been targeted for a comparative study with the naturally occurring mix of terpenes (viz. Melaleuca alternifolia oil) from which it is commonly distilled. Positive ion mode mass spectra of both terpinen-4-ol and M. alternifolia oil showed a decrease in disparities between the type and abundance of cationic species formed in their respective plasma environments as applied plasma power was increased. Supplementary biological assay revealed the antibacterial action of both terpinen-4-ol and M. alternifolia derived coatings with respect to S. aureus bacteria, whilst cytocompatibility was demonstrated by comparable eukaryotic cell adhesion to both coatings. Elucidating the processes occurring within the reactive plasmas can enhance the economics of plasma polymer deposition by permitting use of the minimum power, time and precursor pre-processing required to control the extent of monomer fragmentation and fabricate a film of the desired thickness and functionality.

Preparation and atomic oxygen erosion resistance of SiOx coating formed on polyimide film by plasma polymer deposition

Vacuum ◽  
2019 ◽  
Vol 165 ◽  
pp. 7-11 ◽  
Author(s):  
Huifeng Mu ◽  
Xue Wang ◽  
Zhonghua Li ◽  
Yuanyuan Xie ◽  
Yuan Gao ◽  
...  
Keyword(s):  
Atomic Oxygen ◽  
Erosion Resistance ◽  
Polyimide Film ◽  
Plasma Polymer ◽  
Polymer Deposition ◽  
Atomic Oxygen Erosion

scholarly journals Aspect-ratio-dependent charging in high-density plasmas

1997 ◽  
Vol 82 (2) ◽  
pp. 566-571 ◽  
Author(s):  
Gyeong S. Hwang ◽  
Konstantinos P. Giapis
Keyword(s):  
Aspect Ratio ◽  
High Density ◽  
Ratio Dependent

Mechanistic underpinning of cell aspect ratio-dependent emergent collective motions in swarming bacteria

Soft Matter ◽  
2021 ◽  
Author(s):  
Palash Bera ◽  
Abdul Wasim ◽  
Jagannath Mondal ◽  
Pushpita Ghosh
Keyword(s):  
Aspect Ratio ◽  
Self Organized ◽  
Collective Motions ◽  
Ratio Dependent ◽  
Non Equilibrium

Self-propelled bacteria can exhibit a large variety of non-equilibrium self-organized phenomena. Swarming is one such fascinating dynamical scenario where a number of motile individuals group into dynamical clusters and move...

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