Impact of excitation waveform on the frequency stability of electrostatically-actuated micro-electromechanical oscillators

2018 ◽  
Vol 422 ◽  
pp. 79-91 ◽  
Author(s):  
J. Juillard ◽  
A. Brenes
Keyword(s):  
Frequency Stability ◽  
Electrostatically Actuated ◽  
Excitation Waveform

scholarly journals Phase-delay Induced Variation of Synchronization Bandwidth and Frequency Stability in a Micromechanical Oscillator

2021 ◽  
Author(s):  
Zhan Shi ◽  
Dong Pu ◽  
Xuefeng Wang ◽  
Ronghua Huan ◽  
Zhuangde Jiang ◽  
...  
Keyword(s):  
High Performance ◽  
Experimental Tests ◽  
Frequency Stability ◽  
Phase Delay ◽  
Variation Pattern ◽  
Beam Resonator ◽  
Electrostatically Actuated ◽  
Sensor Applications ◽  
Mems Oscillator ◽  
Induced Variation

Abstract Phase feedback is commonly utilized to set up a synchronized MEMS oscillator for high performance sensor applications. It's a consensus that the synchronization region varies with phase delay with a `Anti-U' mode within 0 to pi and phase delay is typically fixed on pi/2 to achieve maximum synchronization range and best frequency stability. In this paper, phase-delay induced variation of synchronization bandwidth and frequency stability in a micromechanical oscillator is investigated analytically and experimentally. A self-sustained oscillator is built by applying phase feedback to an electrostatically actuated micro-beam resonator and synchronization phenomenon is observed after coupling it to a weak external periodic excitation. The analytical expression for predicting the synchronization bandwidth with phase delay is derived based on the dynamic model, from which three different types (`U', `Anti-U' and `M') of variation pattern of synchronization bandwidth are observed as feedback tuning. The variation of frequency stability along phase delay is also studied. The synchronization bandwidth and the frequency stability have exactly opposite variation pattern with phase delay in linear oscillators while they are totally consistent in nonlinear oscillators. Experimental tests in vacuum environment are carried out to validate the analytical observations. Our work presented here provides a precise way for achieving best performance of a synchronized MEMS oscillator in the sensor application.

scholarly journals Influence of Excitation Waveform on the Frequency Stability of an Electrostatic MEMS Oscillator

2016 ◽  
Vol 168 ◽  
pp. 958-961
Author(s):  
Jérôme Juillard ◽  
Alexis Brenes ◽  
Filipe Vinci dos Santos
Keyword(s):  
Frequency Stability ◽  
Electrostatic Mems ◽  
Mems Oscillator ◽  
Excitation Waveform

Design Method to Achieve High Frequency Stability of Electrostatically Actuated Doubly-Clamped Nano-Oscillators

2014 ◽  
Author(s):  
A. Bhushan ◽  
M. M. Inamdar ◽  
D. N. Pawaskar
Keyword(s):  
Operating Temperature ◽  
Design Method ◽  
Design Procedure ◽  
Beam Theory ◽  
Frequency Stability ◽  
Internal Stresses ◽  
Frequency Variation ◽  
Electrostatically Actuated ◽  
Highly Sensitive ◽  
Natural Frequency Variation

Frequency stability is a desirable property for micro- and nanoelectromechanical system oscillators used in reference and timing applications. In case of doubly-clamped oscillators, resonant frequencies are highly sensitive to the operating temperature because of development of internal stresses due to thermal expansion under the restraint of fixed boundary conditions. In this paper, we present a design procedure to reduce the variation of resonant frequency with respect to change in operating temperature, in other words improve the frequency stability, by exploiting the interaction between electrostatic and geometric nonlinearities in electrostatically actuated doubly-clamped nano-oscillators. We have modeled the nano-oscillators using Euler-Bernoulli beam theory and Galerkin based reduced order modeling technique. We have examined first natural frequency variation due to temperature change for different carbon nanotube oscillators and an optimization based design procedure has been devised for improving the frequency stability.

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