The effects of surface roughness and nanostructure on the properties of indium tin oxide (ITO) designated for novel optoelectronic devices fabrication

2008 ◽  
Vol 208 (1-3) ◽  
pp. 514-519 ◽  
Author(s):  
G. Kavei ◽  
A. Mohammadi Gheidari
Keyword(s):  
Surface Roughness ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Optoelectronic Devices

scholarly journals Evaluation of electrical resistivity, residual stress and surface roughness of sputtering indium tin oxide films with different thicknesses

2021 ◽  
Vol 51 (4) ◽  
Author(s):  
Chuen-Lin Tien ◽  
Tsai-Wei Lin ◽  
Shu-Hui Su
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Surface Roughness ◽  
Electrical Resistivity ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Measurement Results ◽  
Ito Thin Films ◽  
Tin Oxide Films ◽  
Ito Films

This paper investigates the influence of film thickness on the electrical and mechanical properties of transparent indium tin oxide (ITO) thin films. Two groups of ITO thin films deposited on unheated substrates were prepared by the radio-frequency magnetron sputtering technique. The biaxial residual stress and surface roughness for two groups of ITO thin films were measured by a Twyman–Green interferometer and a Linnik microscopic interferometer, respectively. The electrical resistivity of the ITO films was measured by a four-point probe apparatus, the thickness was determined mechanically with a profilometer. The measurement results show that the average resistivity of ITO thin films decreases with increasing the deposited thickness. The compressive residual stress in the ITO thin films decreases with increasing the deposited thickness. We also find that an anisotropic stress in the two groups of ITO films is more compressive in a certain direction. The RMS surface roughness in the two groups of ITO films is less than 1 nm.

Indium tin oxide contacts to gallium nitride optoelectronic devices

1999 ◽  
Vol 74 (26) ◽  
pp. 3930-3932 ◽  
Author(s):  
T. Margalith ◽  
O. Buchinsky ◽  
D. A. Cohen ◽  
A. C. Abare ◽  
M. Hansen ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Optoelectronic Devices

scholarly journals Dynamically Switching the Electronic and Electrostatic Properties of Indium–Tin Oxide Electrodes with Photochromic Monolayers: Toward Photoswitchable Optoelectronic Devices

2019 ◽  
Vol 2 (2) ◽  
pp. 1102-1110 ◽  
Author(s):  
Qiankun Wang ◽  
Valentin Diez-Cabanes ◽  
Simone Dell’Elce ◽  
Andrea Liscio ◽  
Björn Kobin ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Optoelectronic Devices ◽  
Electrostatic Properties ◽  
Oxide Electrodes

Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

2005 ◽  
Vol 23 (5) ◽  
pp. 1305-1308 ◽  
Author(s):  
Yow-Jon Lin ◽  
Iain D. Baikie ◽  
Wei-Yang Chou ◽  
Shih-Ting Lin ◽  
Hsing-Cheng Chang ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Work Function ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser
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