Three hundred micron squared all-solid-state Li ion secondary battery fabricated by Si very large scale integration technology

2013 ◽  
Vol 551 ◽  
pp. 44-47 ◽  
Author(s):  
Yuuki Yamada ◽  
Takaaki Nozaki ◽  
Kazuo Kuriyama ◽  
Kazumasa Kushida
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