Ion contributions to gas–surface interactions in inductively-coupled fluorocarbon plasmas

International Journal of Mass Spectrometry ◽

10.1016/j.ijms.2012.09.006 ◽

2012 ◽

Vol 330-332 ◽

pp. 46-57 ◽

Cited By ~ 5

Author(s):

Michael F. Cuddy ◽

Joshua M. Blechle ◽

Ellen R. Fisher

Keyword(s):

Surface Interactions ◽

Inductively Coupled ◽

Fluorocarbon Plasmas ◽

Gas Surface Interactions

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Plasma‐ and gas‐surface interactions during the chemical vapor deposition of tungsten from H2/WF6

Journal of Applied Physics ◽

10.1063/1.341254 ◽

1988 ◽

Vol 64 (9) ◽

pp. 4696-4703 ◽

Cited By ~ 9

Author(s):

W. M. Green ◽

D. W. Hess ◽

W. G. Oldham

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Surface Interactions ◽

Gas Surface Interactions

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GAS-SURFACE INTERACTIONS FOR SNAP FUEL PARTICLE REENTRY. Thermo-Physics Technical Note No. 59.

10.2172/4469656 ◽

1966 ◽

Author(s):

H.E. Johnson

Keyword(s):

Surface Interactions ◽

Technical Note ◽

Fuel Particle ◽

Gas Surface Interactions

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Particle-gas-surface interactions in collection devices

International Journal of Multiphase Flow ◽

10.1016/0301-9322(73)90006-2 ◽

1973 ◽

Vol 1 (1) ◽

pp. 89-101 ◽

Cited By ~ 10

Author(s):

S.L. Soo

Keyword(s):

Surface Interactions ◽

Gas Surface Interactions

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Variational Calculation of the Slip Coefficient and the Temperature Jump for Arbitrary Gas-Surface Interactions

Rarefied Gas Dynamics: Space-Related Studies ◽

10.2514/5.9781600865909.0553.0561 ◽

1989 ◽

pp. 553-561 ◽

Cited By ~ 1

Keyword(s):

Temperature Jump ◽

Surface Interactions ◽

Variational Calculation ◽

Slip Coefficient ◽

Gas Surface Interactions

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Modeling Approaches for Gas-Surface Interactions

48th AIAA Aerospace Sciences Meeting Including the New Horizons Forum and Aerospace Exposition ◽

10.2514/6.2010-1247 ◽

2010 ◽

Cited By ~ 4

Author(s):

G. Herdrich ◽

M. Fertig ◽

D. Petkow ◽

A. Steinbeck

Keyword(s):

Surface Interactions ◽

Modeling Approaches ◽

Gas Surface Interactions

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Kinetic models for gas-surface interactions

Transport Theory and Statistical Physics ◽

10.1080/00411457108231440 ◽

1971 ◽

Vol 1 (2) ◽

pp. 101-114 ◽

Cited By ~ 268

Author(s):

C. Cercignani ◽

M. Lampis

Keyword(s):

Kinetic Models ◽

Surface Interactions ◽

Gas Surface Interactions

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Vibrational relaxation of highly excited H2 molecules in gas-phase and gas-surface interactions

10.1063/1.39637 ◽

1990 ◽

Author(s):

M. Cacciatore ◽

M. Capitelli ◽

G. D. Billing

Keyword(s):

Gas Phase ◽

Vibrational Relaxation ◽

Surface Interactions ◽

Gas Surface Interactions

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Gas-surface interactions on two-dimensional crystals

Surface Science Reports ◽

10.1016/j.surfrep.2019.01.001 ◽

2019 ◽

Vol 74 (2) ◽

pp. 141-177 ◽

Cited By ~ 4

Author(s):

Uwe Burghaus

Keyword(s):

Surface Interactions ◽

Two Dimensional ◽

Gas Surface Interactions

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Gas-surface interactions with vibrationally excited molecules

Chemical Reviews ◽

10.1021/cr00086a005 ◽

1988 ◽

Vol 88 (4) ◽

pp. 657-671 ◽

Cited By ~ 28

Author(s):

Paul L. Houston ◽

Robert P. Merrill

Keyword(s):

Surface Interactions ◽

Vibrationally Excited ◽

Excited Molecules ◽

Gas Surface Interactions

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Etching characteristics of high-k dielectric HfO2 thin films in inductively coupled fluorocarbon plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2073468 ◽

2005 ◽

Vol 23 (6) ◽

pp. 1691-1697 ◽

Cited By ~ 11

Author(s):

Kazuo Takahashi ◽

Kouichi Ono ◽

Yuichi Setsuhara

Keyword(s):

Thin Films ◽

Inductively Coupled ◽

Fluorocarbon Plasmas ◽

High K ◽

High K Dielectric

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