Understanding focused ion beam guided anodic alumina nanopore development

2011 ◽  
Vol 56 (27) ◽  
pp. 9802-9807 ◽  
Author(s):  
Bo Chen ◽  
Kathy Lu ◽  
Zhipeng Tian
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Anodic Alumina

High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays

2003 ◽  
Vol 82 (8) ◽  
pp. 1281-1283 ◽  
Author(s):  
N. W. Liu ◽  
A. Datta ◽  
C. Y. Liu ◽  
Y. L. Wang
Keyword(s):  
High Speed ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Anodic Alumina ◽  
Ion Beam Patterning ◽  
Nanochannel Arrays

Focused‐Ion‐Beam‐Based Selective Closing and Opening of Anodic Alumina Nanochannels for the Growth of Nanowire Arrays Comprising Multiple Elements

2008 ◽  
Vol 20 (13) ◽  
pp. 2547-2551 ◽  
Author(s):  
Nai‐Wei Liu ◽  
Chih‐Yi Liu ◽  
Huai‐Hsien Wang ◽  
Chen‐Feng Hsu ◽  
Ming‐Yu Lai ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Anodic Alumina ◽  
Nanowire Arrays

Order–disorder transition of anodic alumina nanochannel arrays grown under the guidance of focused-ion-beam patterning

2004 ◽  
Vol 84 (14) ◽  
pp. 2509-2511 ◽  
Author(s):  
C. Y. Liu ◽  
A. Datta ◽  
N. W. Liu ◽  
C. Y. Peng ◽  
Y. L. Wang
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Anodic Alumina ◽  
Disorder Transition ◽  
Ion Beam Patterning ◽  
Nanochannel Arrays

Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces

2001 ◽  
Vol 78 (1) ◽  
pp. 120-122 ◽  
Author(s):  
C. Y. Liu ◽  
A. Datta ◽  
Y. L. Wang
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Anodic Alumina ◽  
Aluminum Surfaces

Nanocomposite Polyurethane Foams Via POSS Blends

2002 ◽  
Vol 733 ◽  
Author(s):  
Brock McCabe ◽  
Steven Nutt ◽  
Brent Viers ◽  
Tim Haddad
Keyword(s):  
High Temperature ◽  
Sample Preparation ◽  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Polyurethane Foams ◽  
Development Projects ◽  
Polymer Systems ◽  
Polyurethane Resin ◽  
Military Development

AbstractPolyhedral Oligomeric Silsequioxane molecules have been incorporated into a commercial polyurethane formulation to produce nanocomposite polyurethane foam. This tiny POSS silica molecule has been used successfully to enhance the performance of polymer systems using co-polymerization and blend strategies. In our investigation, we chose a high-temperature MDI Polyurethane resin foam currently used in military development projects. For the nanofiller, or “blend”, Cp7T7(OH)3 POSS was chosen. Structural characterization was accomplished by TEM and SEM to determine POSS dispersion and cell morphology, respectively. Thermal behavior was investigated by TGA. Two methods of TEM sample preparation were employed, Focused Ion Beam and Ultramicrotomy (room temperature).

An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

2002 ◽  
Vol 719 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
Kyu Hwan Oh
Keyword(s):  
Cross Sections ◽  
Focused Ion Beam ◽  
Imaging System ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Glass Substrates ◽  
Atomic Force ◽  
Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

Low Energy Ar Ion Milling of FIB TEM Specimens from 14 nm and Future FinFET Technologies

2018 ◽  
Author(s):  
C.S. Bonifacio ◽  
P. Nowakowski ◽  
M.J. Campin ◽  
M.L. Ray ◽  
P.E. Fischione
Keyword(s):  
Field Effect Transistor ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Ion Milling ◽  
Transmission Electron ◽  
High Resolution Tem ◽  
Effect Transistor ◽  
20 Nm ◽  
Argon Ion

Abstract Transmission electron microscopy (TEM) specimens are typically prepared using the focused ion beam (FIB) due to its site specificity, and fast and accurate thinning capabilities. However, TEM and high-resolution TEM (HRTEM) analysis may be limited due to the resulting FIB-induced artifacts. This work identifies FIB artifacts and presents the use of argon ion milling for the removal of FIB-induced damage for reproducible TEM specimen preparation of current and future fin field effect transistor (FinFET) technologies. Subsequently, high-quality and electron-transparent TEM specimens of less than 20 nm are obtained.

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