Dynamics and temperature dependence of etching processes of porous and barrier aluminum oxide layers

Dmitri A. Brevnov; G.V. Rama Rao; Gabriel P. López; Plamen B. Atanassov

doi:10.1016/j.electacta.2004.02.003

Dynamics and temperature dependence of etching processes of porous and barrier aluminum oxide layers

Electrochimica Acta ◽

10.1016/j.electacta.2004.02.003 ◽

2004 ◽

Vol 49 (15) ◽

pp. 2487-2494 ◽

Cited By ~ 36

Author(s):

Dmitri A. Brevnov ◽

G.V. Rama Rao ◽

Gabriel P. López ◽

Plamen B. Atanassov

Keyword(s):

Aluminum Oxide ◽

Temperature Dependence ◽

Oxide Layers

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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Thin Solid Films ◽

10.1016/j.tsf.2013.11.112 ◽

2014 ◽

Vol 552 ◽

pp. 124-135 ◽

Cited By ~ 97

Author(s):

Oili M.E. Ylivaara ◽

Xuwen Liu ◽

Lauri Kilpi ◽

Jussi Lyytinen ◽

Dieter Schneider ◽

...

Keyword(s):

Residual Stress ◽

Elastic Modulus ◽

Atomic Layer Deposition ◽

Aluminum Oxide ◽

Temperature Dependence ◽

Atomic Layer ◽

Layer Deposition

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Low-temperature laser generated ultrathin aluminum oxide layers for effective c-Si surface passivation

Applied Surface Science ◽

10.1016/j.apsusc.2019.02.023 ◽

2019 ◽

Vol 480 ◽

pp. 35-42 ◽

Cited By ~ 4

Author(s):

Peixun Fan ◽

Zeming Sun ◽

George C. Wilkes ◽

Mool C. Gupta

Keyword(s):

Low Temperature ◽

Aluminum Oxide ◽

Surface Passivation ◽

Oxide Layers

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ChemInform Abstract: THE TEMPERATURE DEPENDENCE OF RARE-EARTH ACTIVATED GARNET PHOSPHORS. I. INTENSITY AND LIFETIME MEASUREMENTS ON UNDOPED AND CERIUM-DOPED YTTRIUM ALUMINUM OXIDE (Y3AL5O12)

Chemischer Informationsdienst ◽

10.1002/chin.197943007 ◽

1979 ◽

Vol 10 (43) ◽

Author(s):

D. J. ROBBINS ◽

B. COCKAYNE ◽

J. L. GLASPER ◽

B. LENT

Keyword(s):

Rare Earth ◽

Aluminum Oxide ◽

Temperature Dependence ◽

Lifetime Measurements ◽

Yttrium Aluminum Oxide ◽

Yttrium Aluminum

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Electrical insulation performance of aluminum oxide layers on metallic substrates – HiPIMS compared to RF-MS

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2019.01.010 ◽

2019 ◽

Vol 361 ◽

pp. 119-122

Author(s):

Frank Schmaljohann ◽

Daniel Hagedorn ◽

Frank Löffler

Keyword(s):

Aluminum Oxide ◽

Electrical Insulation ◽

Oxide Layers ◽

Metallic Substrates ◽

Insulation Performance

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Impulse plasma deposition of aluminum oxide layers for Al2O3/Si, SiC, GaN systems

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00527-9 ◽

2003 ◽

Vol 174-175 ◽

pp. 170-175 ◽

Cited By ~ 10

Author(s):

A. Werbowy ◽

K. Zdunek ◽

E. Dusiński ◽

J. Szmidt ◽

M. Elert

Keyword(s):

Aluminum Oxide ◽

Plasma Deposition ◽

Oxide Layers

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Hillock morphology and density in AlTa and AlCu alloy films encapsulated with aluminum oxide layers

Fourth international workshop on stress induced phenomena in metallization ◽

10.1063/1.54661 ◽

1998 ◽

Author(s):

Eiji Iwamura ◽

Katsutoshi Takagi ◽

Takashi Ohnishi

Keyword(s):

Aluminum Oxide ◽

Alloy Films ◽

Oxide Layers

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Insertion loss characteristics of passive devices fabricated on anodized aluminum oxide layers formed on Si substrates

Sensors and Actuators A Physical ◽

10.1016/j.sna.2009.11.021 ◽

2010 ◽

Vol 157 (1) ◽

pp. 32-35 ◽

Cited By ~ 1

Author(s):

Hye Min Ji ◽

Won Sang Lee ◽

Daniel S. Choi ◽

Young Keun Kim

Keyword(s):

Aluminum Oxide ◽

Insertion Loss ◽

Anodized Aluminum ◽

Anodized Aluminum Oxide ◽

Oxide Layers ◽

Si Substrates ◽

Passive Devices

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Charge properties of aluminum oxide layers synthesized by molecular layering

Technical Physics Letters ◽

10.1134/1.1262179 ◽

1998 ◽

Vol 24 (7) ◽

pp. 525-526 ◽

Cited By ~ 3

Author(s):

S. G. Sazonov ◽

Z. N. Zuluev ◽

V. E. Drozd ◽

I. O. Nikiforova

Keyword(s):

Aluminum Oxide ◽

Molecular Layering ◽

Oxide Layers

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Observation of compensation effects during the thermal dissolution of aluminum oxide layers on tungsten and molybdenum 〈111〉 and on tungsten {110} in the presence of electric fields

Surface Science ◽

10.1016/0039-6028(84)90386-8 ◽

1984 ◽

Vol 140 (1) ◽

pp. 123-136 ◽

Cited By ~ 2

Author(s):

R. Vanselow ◽

L.R. Pederson

Keyword(s):

Aluminum Oxide ◽

Electric Fields ◽

Oxide Layers ◽

Thermal Dissolution

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Air-Impregnated Nanoporous Anodic Aluminum Oxide Layers for Enhancing the Corrosion Resistance of Aluminum

Langmuir ◽

10.1021/acs.langmuir.5b02392 ◽

2015 ◽

Vol 31 (40) ◽

pp. 11040-11050 ◽

Cited By ~ 42

Author(s):

Chanyoung Jeong ◽

Junghoon Lee ◽

Keith Sheppard ◽

Chang-Hwan Choi

Keyword(s):

Corrosion Resistance ◽

Aluminum Oxide ◽

Anodic Aluminum Oxide ◽

Oxide Layers ◽

Anodic Aluminum ◽

Nanoporous Anodic Aluminum Oxide ◽

Nanoporous Anodic Aluminum

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