Hillock morphology and density in AlTa and AlCu alloy films encapsulated with aluminum oxide layers

1998 ◽  
Author(s):  
Eiji Iwamura ◽  
Katsutoshi Takagi ◽  
Takashi Ohnishi
Keyword(s):  
Aluminum Oxide ◽  
Alloy Films ◽  
Oxide Layers

Low-temperature laser generated ultrathin aluminum oxide layers for effective c-Si surface passivation

2019 ◽  
Vol 480 ◽  
pp. 35-42 ◽  
Author(s):  
Peixun Fan ◽  
Zeming Sun ◽  
George C. Wilkes ◽  
Mool C. Gupta
Keyword(s):  
Low Temperature ◽  
Aluminum Oxide ◽  
Surface Passivation ◽  
Oxide Layers

Impulse plasma deposition of aluminum oxide layers for Al2O3/Si, SiC, GaN systems

2003 ◽  
Vol 174-175 ◽  
pp. 170-175 ◽  
Author(s):  
A. Werbowy ◽  
K. Zdunek ◽  
E. Dusiński ◽  
J. Szmidt ◽  
M. Elert
Keyword(s):  
Aluminum Oxide ◽  
Plasma Deposition ◽  
Oxide Layers

Charge properties of aluminum oxide layers synthesized by molecular layering

1998 ◽  
Vol 24 (7) ◽  
pp. 525-526 ◽  
Author(s):  
S. G. Sazonov ◽  
Z. N. Zuluev ◽  
V. E. Drozd ◽  
I. O. Nikiforova
Keyword(s):  
Aluminum Oxide ◽  
Molecular Layering ◽  
Oxide Layers

GaAs structures with a gate dielectric based on aluminum-oxide layers

2016 ◽  
Vol 50 (2) ◽  
pp. 204-207 ◽  
Author(s):  
I. L. Kalentyeva ◽  
O. V. Vikhrova ◽  
A. V. Zdoroveyshchev ◽  
Yu. A. Danilov ◽  
A. V. Kudrin
Keyword(s):  
Aluminum Oxide ◽  
Gate Dielectric ◽  
Oxide Layers

Structure and properties of composite aluminum oxide layers produced on magnesium alloys using hybrid method

Vacuum ◽  
2019 ◽  
Vol 160 ◽  
pp. 325-332 ◽  
Author(s):  
M. Tacikowski ◽  
P. Kobus ◽  
J. Kamiński ◽  
B. Kucharska ◽  
K. Kulikowski ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Magnesium Alloys ◽  
Hybrid Method ◽  
Structure And Properties ◽  
Oxide Layers
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