Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing

2012 ◽  
Vol 21 ◽  
pp. 16-23 ◽  
Author(s):  
Brian R. Patton ◽  
Philip R. Dolan ◽  
Fabio Grazioso ◽  
Matthew B. Wincott ◽  
Jason M. Smith ◽  
...  
Keyword(s):  
Optical Properties ◽  
Ion Implantation ◽  
Single Crystal ◽  
Single Crystal Diamond ◽  
Lift Off

Ion implantation induced modification of optical properties in single-crystal diamond studied by coherent acoustic phonon spectroscopy

2012 ◽  
Vol 101 (18) ◽  
pp. 181904 ◽  
Author(s):  
Justin Gregory ◽  
Andrew Steigerwald ◽  
Hiroaki Takahashi ◽  
Anthony Hmelo ◽  
Norman Tolk
Keyword(s):  
Optical Properties ◽  
Ion Implantation ◽  
Single Crystal ◽  
Acoustic Phonon ◽  
Single Crystal Diamond ◽  
Coherent Acoustic Phonon

Lift -Off Process to get Free-Standing High Quality Single Crystal Diamond Films and Suspended Single Crystal Diamond Devices

2006 ◽  
Vol 956 ◽  
Author(s):  
Jie Yang ◽  
C. F. Wang ◽  
E. L. Hu ◽  
James E. Butler
Keyword(s):  
Ion Implantation ◽  
Single Crystal ◽  
Light Transmission ◽  
Electrochemical Etching ◽  
Etching Process ◽  
Critical Parameters ◽  
Transmission Microscopy ◽  
Single Crystal Diamond ◽  
Cvd Growth ◽  
Lift Off

ABSTRACTFreestanding and suspended single crystal diamond devices, micro disks and beam structures, have been fabricated on single crystal diamond substrates using a lift-off process employing ion implantation followed by electrochemical etching. The ion implantation created subsurface damage in the diamond while the top surface was sufficiently undamaged that a subsequent homo-epitaxial diamond layer could be grown by chemical vapor deposition (CVD). After the CVD growth and patterning by lithography and reactive ion etching, the underlying damage layer was etched/removed by an electrochemical etch. Different implant ions and energies were simulated and tested to optimize the process. The electrochemical etching process was monitored by an optical video technique. The electrochemical etching process used both ac and dc applied electrical potentials. Photoluminescence (PL), Raman spectra, and polarized light transmission microscopy have been used to characterize the implanted substrate and lift-off films. AFM has been used to monitor the surface changes after mechanical polishing, ion implantation, CVD growth and the lift-off process. This research has revealed that the parameters of ion implantation (implant species, dose and energy) dramatically affect the lift-off process. The etching mechanism and critical parameters are discussed in this work. PL spectroscopy indicated differences between the uppermost layers of the homo-epitaxial film and the lift-off interface. Three principal classes of defects have been observed: growth defects inherent in the diamond substrates (type Ib, HPHT), defects induced by the polishing process and associated stress, and point defects.

Measurement of charge carrier's transportation in a large size self-standing CVD single crystal diamond film fabricated using lift-off method

2010 ◽  
Vol 19 (2-3) ◽  
pp. 162-165 ◽  
Author(s):  
F. Fujita ◽  
A. Kakimoto ◽  
J.H. Kaneko ◽  
N. Tsubouchi ◽  
Y. Mokuno ◽  
...  
Keyword(s):  
Single Crystal ◽  
Diamond Film ◽  
Large Size ◽  
Single Crystal Diamond ◽  
Lift Off

A nitrogen doped low-dislocation density free-standing single crystal diamond plate fabricated by a lift-off process

2014 ◽  
Vol 104 (25) ◽  
pp. 252109 ◽  
Author(s):  
Yoshiaki Mokuno ◽  
Yukako Kato ◽  
Nobuteru Tsubouchi ◽  
Akiyoshi Chayahara ◽  
Hideaki Yamada ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Single Crystal ◽  
Free Standing ◽  
Nitrogen Doped ◽  
Diamond Plate ◽  
Low Dislocation Density ◽  
Single Crystal Diamond ◽  
Lift Off

scholarly journals Ultra-smooth single crystal diamond surfaces resulting from implantation and lift-off processes

2011 ◽  
Vol 208 (9) ◽  
pp. 2057-2061 ◽  
Author(s):  
T. N. Tran Thi ◽  
B. Fernandez ◽  
D. Eon ◽  
E. Gheeraert ◽  
J. Härtwig ◽  
...  
Keyword(s):  
Single Crystal ◽  
Diamond Surfaces ◽  
Single Crystal Diamond ◽  
Lift Off

Single‐crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

1992 ◽  
Vol 61 (26) ◽  
pp. 3124-3126 ◽  
Author(s):  
N. R. Parikh ◽  
J. D. Hunn ◽  
E. McGucken ◽  
M. L. Swanson ◽  
C. W. White ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Single Crystal ◽  
Subsequent Annealing ◽  
Diamond Plate ◽  
Single Crystal Diamond
Sign in / Sign up

Export Citation Format

Share Document