scholarly journals Ultra-smooth single crystal diamond surfaces resulting from implantation and lift-off processes

2011 ◽  
Vol 208 (9) ◽  
pp. 2057-2061 ◽  
Author(s):  
T. N. Tran Thi ◽  
B. Fernandez ◽  
D. Eon ◽  
E. Gheeraert ◽  
J. Härtwig ◽  
...  
Keyword(s):  
Single Crystal ◽  
Diamond Surfaces ◽  
Single Crystal Diamond ◽  
Lift Off

Measurement of charge carrier's transportation in a large size self-standing CVD single crystal diamond film fabricated using lift-off method

2010 ◽  
Vol 19 (2-3) ◽  
pp. 162-165 ◽  
Author(s):  
F. Fujita ◽  
A. Kakimoto ◽  
J.H. Kaneko ◽  
N. Tsubouchi ◽  
Y. Mokuno ◽  
...  
Keyword(s):  
Single Crystal ◽  
Diamond Film ◽  
Large Size ◽  
Single Crystal Diamond ◽  
Lift Off

A nitrogen doped low-dislocation density free-standing single crystal diamond plate fabricated by a lift-off process

2014 ◽  
Vol 104 (25) ◽  
pp. 252109 ◽  
Author(s):  
Yoshiaki Mokuno ◽  
Yukako Kato ◽  
Nobuteru Tsubouchi ◽  
Akiyoshi Chayahara ◽  
Hideaki Yamada ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Single Crystal ◽  
Free Standing ◽  
Nitrogen Doped ◽  
Diamond Plate ◽  
Low Dislocation Density ◽  
Single Crystal Diamond ◽  
Lift Off

Influence of morphology on the conductance of single-crystal diamond surfaces measured by atomic force microscopy

2009 ◽  
Vol 106 (5) ◽  
pp. 054301 ◽  
Author(s):  
E. Tranvouez ◽  
E. Boer-Duchemin ◽  
A. J. Mayne ◽  
T. Vanderbruggen ◽  
M. Scheele ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Single Crystal ◽  
Diamond Surfaces ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond

Lift -Off Process to get Free-Standing High Quality Single Crystal Diamond Films and Suspended Single Crystal Diamond Devices

2006 ◽  
Vol 956 ◽  
Author(s):  
Jie Yang ◽  
C. F. Wang ◽  
E. L. Hu ◽  
James E. Butler
Keyword(s):  
Ion Implantation ◽  
Single Crystal ◽  
Light Transmission ◽  
Electrochemical Etching ◽  
Etching Process ◽  
Critical Parameters ◽  
Transmission Microscopy ◽  
Single Crystal Diamond ◽  
Cvd Growth ◽  
Lift Off

ABSTRACTFreestanding and suspended single crystal diamond devices, micro disks and beam structures, have been fabricated on single crystal diamond substrates using a lift-off process employing ion implantation followed by electrochemical etching. The ion implantation created subsurface damage in the diamond while the top surface was sufficiently undamaged that a subsequent homo-epitaxial diamond layer could be grown by chemical vapor deposition (CVD). After the CVD growth and patterning by lithography and reactive ion etching, the underlying damage layer was etched/removed by an electrochemical etch. Different implant ions and energies were simulated and tested to optimize the process. The electrochemical etching process was monitored by an optical video technique. The electrochemical etching process used both ac and dc applied electrical potentials. Photoluminescence (PL), Raman spectra, and polarized light transmission microscopy have been used to characterize the implanted substrate and lift-off films. AFM has been used to monitor the surface changes after mechanical polishing, ion implantation, CVD growth and the lift-off process. This research has revealed that the parameters of ion implantation (implant species, dose and energy) dramatically affect the lift-off process. The etching mechanism and critical parameters are discussed in this work. PL spectroscopy indicated differences between the uppermost layers of the homo-epitaxial film and the lift-off interface. Three principal classes of defects have been observed: growth defects inherent in the diamond substrates (type Ib, HPHT), defects induced by the polishing process and associated stress, and point defects.

Molecular orientation of lead phthalocyanine on (100) oriented single crystal diamond surfaces

2015 ◽  
Vol 17 (15) ◽  
pp. 9619-9623 ◽  
Author(s):  
Wim Dexters ◽  
Emilie Bourgeois ◽  
Milos Nesládek ◽  
Jan D'Haen ◽  
Etienne Goovaerts ◽  
...  
Keyword(s):  
Thin Films ◽  
Single Crystal ◽  
Molecular Orientation ◽  
Structure And Properties ◽  
Diamond Surfaces ◽  
Single Crystal Diamond ◽  
Oriented Single Crystal

The structure and properties of lead phthalocyanine thin films on hydrogen- and oxygen terminated single crystal diamond were investigated.

Surface Cleaning, Topography, and Temperature Measurements of Single Crystal Diamond

1994 ◽  
Vol 339 ◽  
Author(s):  
Mark P. D'Evelyn ◽  
Lisa M. Struck ◽  
Robin E. Rawles
Keyword(s):  
Single Crystal ◽  
Surface Science ◽  
Surface Cleaning ◽  
Diamond Surfaces ◽  
Surface Hydroxyl ◽  
Force Microscopy ◽  
Atomic Force ◽  
Single Crystal Diamond ◽  
Adsorption Desorption ◽  
Internal Reflection Spectroscopy

ABSTRACTApplication of surface science methods to single crystal diamond surfaces requires the preparation of clean, well-ordered surfaces and accurate measurement of substrate temperature. Cleaning of diamond (100) in H2SO4/HNO3/HClO4 produced several infrared absorption features between 1025 and 1275 cm-1, as observed by infrared multiple-internal-reflection spectroscopy. These modes are assigned to surface hydroxyl and bridge-bonded oxygen. Heating an oxidized surface to ca. 1130 °C caused disappearance of a surface hydroxyl mode centered at 1080 cm-1. We show by atomic force microscopy that an as-polished diamond (100) sample is covered by grooves and ridges several nm in height, implying a modest density of atomic steps. The surface of a diamond that underwent etching via numerous adsorption/desorption experiments in ultrahigh vacuum and was acid cleaned several times was essentially unchanged, indicating a minimal perturbation of the surface topography. The capability of Fizeau interferometry for accurate measurement of single-crystal diamond temperatures is demonstrated.

Ion-Beam-Assisted Lift-Off Technique for Three-Dimensional Micromachining of Freestanding Single-Crystal Diamond

2005 ◽  
Vol 17 (20) ◽  
pp. 2427-2430 ◽  
Author(s):  
P. Olivero ◽  
S. Rubanov ◽  
P. Reichart ◽  
B. C. Gibson ◽  
S. T. Huntington ◽  
...  
Keyword(s):  
Single Crystal ◽  
Ion Beam ◽  
Three Dimensional ◽  
Single Crystal Diamond ◽  
Lift Off
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