Comparative study of homoepitaxial single crystal diamond growth at continuous and pulsed mode of MPACVD reactor operation

2011 ◽  
Vol 20 (8) ◽  
pp. 1225-1228 ◽  
Author(s):  
A.B. Muchnikov ◽  
A.L. Vikharev ◽  
A.M. Gorbachev ◽  
D.B. Radishev
Keyword(s):  
Comparative Study ◽  
Single Crystal ◽  
Diamond Growth ◽  
Reactor Operation ◽  
Pulsed Mode ◽  
Single Crystal Diamond

scholarly journals Surface Morphology and Microstructure Evolution of Single Crystal Diamond during Different Homoepitaxial Growth Stages

Materials ◽  
2021 ◽  
Vol 14 (20) ◽  
pp. 5964
Author(s):  
Guoqing Shao ◽  
Juan Wang ◽  
Shumiao Zhang ◽  
Yanfeng Wang ◽  
Wei Wang ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Single Crystal ◽  
Cross Section ◽  
Growth Model ◽  
Diamond Growth ◽  
Step Flow ◽  
Homoepitaxial Growth ◽  
Diamond Substrate ◽  
Single Crystal Diamond ◽  
Step Flow Growth

Homoepitaxial growth of step-flow single crystal diamond was performed by microwave plasma chemical vapor deposition system on high-pressure high-temperature diamond substrate. A coarse surface morphology with isolated particles was firstly deposited on diamond substrate as an interlayer under hillock growth model. Then, the growth model was changed to step-flow growth model for growing step-flow single crystal diamond layer on this hillock interlayer. Furthermore, the surface morphology evolution, cross-section and surface microstructure, and crystal quality of grown diamond were evaluated by scanning electron microscopy, high-resolution transmission electron microcopy, and Raman and photoluminescence spectroscopy. It was found that the surface morphology varied with deposition time under step-flow growth parameters. The cross-section topography exhibited obvious inhomogeneity in crystal structure. Additionally, the diamond growth mechanism from the microscopic point of view was revealed to illustrate the morphological and structural evolution.

scholarly journals Nitrogen and Silicon Defect Incorporation during Homoepitaxial CVD Diamond Growth on (111) Surfaces

2015 ◽  
Vol 1734 ◽  
Author(s):  
Samuel L. Moore ◽  
Yogesh K. Vohra
Keyword(s):  
Single Crystal ◽  
Photoelectron Spectroscopy ◽  
Microwave Plasma ◽  
Nitrogen Concentration ◽  
Chemical Vapor ◽  
Cvd Diamond ◽  
Diamond Growth ◽  
Defect Center ◽  
Defect Centers ◽  
Single Crystal Diamond

ABSTRACTChemical Vapor Deposited (CVD) diamond growth on (111)-diamond surfaces has received increased attention lately because of the use of N-V related centers in quantum computing as well as application of these defect centers in sensing nano-Tesla strength magnetic fields. We have carried out a detailed study of homoepitaxial diamond deposition on (111)-single crystal diamond (SCD) surfaces using a 1.2 kW microwave plasma CVD (MPCVD) system employing methane/hydrogen/nitrogen/oxygen gas phase chemistry. We have utilized Type Ib (111)-oriented single crystal diamonds as seed crystals in our study. The homoepitaxially grown diamond films were analyzed by Raman spectroscopy, Photoluminescence Spectroscopy (PL), X-ray Photoelectron Spectroscopy (XPS), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The nitrogen concentration in the plasma was carefully varied between 0 and 1500 ppm while a ppm level of silicon impurity is present in the plasma from the quartz bell jar. The concentration of N-V defect centers with PL zero phonon lines (ZPL) at 575nm and 637nm and the Si-defect center with a ZPL at 737nm were experimentally detected from a variation in CVD growth conditions and were quantitatively studied. Altering nitrogen and oxygen concentration in the plasma was observed to directly affect N-V and Si-defect incorporation into the (111)-oriented diamond lattice and these findings are presented.

Single Crystal CVD Diamond growth and characterizations

2006 ◽  
Vol 956 ◽  
Author(s):  
Nicolas Olivier Tranchant ◽  
Dominique Tromson ◽  
Zdenek Remes ◽  
Licinio Rocha ◽  
Milos Nesladek ◽  
...  
Keyword(s):  
Single Crystal ◽  
Microwave Plasma ◽  
Plasma Reactor ◽  
Optical Emission ◽  
Cvd Diamond ◽  
Diamond Growth ◽  
Photocurrent Spectroscopy ◽  
Excited Species ◽  
Single Crystal Diamond

ABSTRACTDue to its radiation harness, single crystal CVD diamond is a remarkable material for the construction of detectors used in hadron physics and for medical therapy. In this work, single crystal CVD diamond plates were grown in a microwave plasma reactor, using home design substrate holder and a relatively high pressure. Optical Emission Spectroscopy was employed during the MW-PECVD growth to characterize excited species present in the plasma and to detect the presence of residual gases such as nitrogen which is unsuitable for detector's applications.The samples were characterized using various methods such as Raman spectroscopy, photoluminescence (PL), photocurrent spectroscopy, Raman mapping, birefringence microscopy, optical microscopy and also AFM. The best sample, exhibits a FWHM for the 1332 cm−1 Raman peak about 1.6 cm−1. Room temperature PL spectra showed no N–related luminescence, confirming the high quality of the grown single crystal diamond.

Recent progress on controlling dislocation density and behavior during heteroepitaxial single crystal diamond growth

2021 ◽  
Vol 36 (6) ◽  
pp. 1034-1045
Author(s):  
Wei-hua Wang ◽  
Yang Wang ◽  
Guo-yang Shu ◽  
Shi-shu Fang ◽  
Jie-cai Han ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Single Crystal ◽  
Recent Progress ◽  
Diamond Growth ◽  
Single Crystal Diamond ◽  
And Behavior

Recent progress on controlling dislocation density and behavior during heteroepitaxial single crystal diamond growth

Carbon ◽  
2022 ◽  
Vol 188 ◽  
pp. 544
Author(s):  
Wei-Hua WANG ◽  
Yang WANG ◽  
Guo-Yang SHU ◽  
Shi-Shu Fang ◽  
Jie-Cai Han ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Single Crystal ◽  
Recent Progress ◽  
Diamond Growth ◽  
Single Crystal Diamond ◽  
And Behavior

Laser monitor for imaging single crystal diamond growth in H2-CH4 microwave plasma

2019 ◽  
Vol 120 ◽  
pp. 105716 ◽  
Author(s):  
Gennadiy Evtushenko ◽  
Stanislav Torgaev ◽  
Maxim Trigub ◽  
Dmitry Shiyanov ◽  
Egor Bushuev ◽  
...  
Keyword(s):  
Single Crystal ◽  
Microwave Plasma ◽  
Diamond Growth ◽  
Single Crystal Diamond

Single crystal diamond growth by MPCVD at subatmospheric pressures

2020 ◽  
Vol 25 ◽  
pp. 101635
Author(s):  
A.P. Bolshakov ◽  
V.G. Ralchenko ◽  
Guoyang Shu ◽  
Bing Dai ◽  
V.Yu. Yurov ◽  
...  
Keyword(s):  
Single Crystal ◽  
Diamond Growth ◽  
Single Crystal Diamond
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