Catalyzed growth model of carbon nanotubes by microwave plasma chemical vapor deposition using CH4 and CO2 gas mixtures

2003 ◽  
Vol 12 (10-11) ◽  
pp. 1829-1835 ◽  
Author(s):  
Mi Chen ◽  
Chieng-Ming Chen ◽  
Horng-Show Koo ◽  
Chia-Fu Chen
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Growth Model ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Gas Mixtures ◽  
Plasma Chemical ◽  
Co2 Gas ◽  
Plasma Chemical Vapor Deposition

scholarly journals Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition

2020 ◽  
Vol 10 (13) ◽  
pp. 4468 ◽  
Author(s):  
Dashuai Li ◽  
Ling Tong ◽  
Bo Gao
Keyword(s):  
Carbon Nanotubes ◽  
Stainless Steel ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Hydrogen Plasma ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

In this paper, we synthesize carbon nanotubes (CNTs) by using atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD). In AMPCVD, a coaxial plasma generator provides 200 W 2.45 GHz microwave plasma at atmospheric pressure to decompose the precursor. A high-temperature tube furnace provides a suitable growth temperature for the deposition of CNTs. Optical fiber spectroscopy was used to measure the compositions of the argon–ethanol–hydrogen plasma. A comparative experiment of ethanol precursor decomposition, with and without plasma, was carried out to measure the role of the microwave plasma, showing that the 200 W microwave plasma can decompose 99% of ethanol precursor at any furnace temperature. CNTs were prepared on a stainless steel substrate by using the technology to decompose ethanol with the plasma power of 200 W at the temperatures of 500, 600, 700, and 800 °C; CNT growth increases with the increase in temperature. Prepared CNTs, analyzed by SEM and HRTEM, were shown to be multiwalled and tangled with each other. The measurement of XPS and Raman spectroscopy indicates that many oxygenated functional groups have attached to the surface of the CNTs.

scholarly journals Direct Growth of Carbon Nanotubes on Aluminum Foil by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition

Processes ◽  
2020 ◽  
Vol 9 (1) ◽  
pp. 36
Author(s):  
Dashuai Li ◽  
Ling Tong
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Aluminum Foil ◽  
Plasma Chemical ◽  
Alumina Layer ◽  
Plasma Chemical Vapor Deposition

This paper is about the research that carbon nanotubes (CNTs) grow on aluminum foils without additional catalysts by atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD) with the precursor of argon-hydrogen-ethanol. At different temperatures, a series of experiments that CNTs grow on aluminum foils were done with and without the alumina layer. The EDS results showed that iron impurities in aluminum foils catalyze the growth of CNTs. By measurements of SEM and HRTEM, tens of microns long and multi-walled CNTs are grown. The CNTs’ content in the sample changes more with the increase in temperature. The Raman measuring shows that CNTs have fewer defects with higher temperature. Finally, by measurements of EDS mapping and XRD on aluminum foil, the growth mechanism of CNTs was discussed.

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