Current conduction mechanisms of RF-Magnetron sputtered Y2O3 gate oxide on gallium nitride

2013 ◽  
Vol 13 (7) ◽  
pp. 1433-1439 ◽  
Author(s):  
Hock Jin Quah ◽  
Kuan Yew Cheong
Author(s):  
Li Liu ◽  
Yin-Tang Yang

AbstractCurrent conduction mechanisms of SiC metal-oxide-semiconductor (MOS) capacitors on n-type 4H-SiC with or without NO annealing have been investigated in this work. It has been revealed that Fowler-Nordheim (FN) tunneling is the dominating current conduction mechanism in high electrical fields, with barrier height of 2.67 and 2.54 eV respectively for samples with NO and without NO annealing. A higher barrier height for NO-annealed sample indicates the effect of N element on the SiC/SiO


2016 ◽  
Vol 858 ◽  
pp. 705-708
Author(s):  
Patrick Fiorenza ◽  
Filippo Giannazzo ◽  
Alessia Frazzetto ◽  
Alfio Guarnera ◽  
Mario Saggio ◽  
...  

This paper reports on the conduction mechanisms through the gate oxide and trapping effects at SiO2/4H-SiC interfaces in MOS-based devices subjected to post deposition annealing in N2O. The phenomena were studied by temperature dependent current–voltage measurements. The analysis of both n and p-MOS capacitors and of n-channel MOSFETs operating in the “gate-controlled-diode” configuration revealed an anomalous hole conduction behaviour through the SiO2/4H-SiC interface, with the onset of current conduction moving towards more negative values during subsequent voltage sweeps. The observed gate current instabilities upon subsequent voltage sweeps were deeply investigated by temperature dependent cyclic gate current measurements. The results were explained by the charge-discharge mechanism of hole traps in the oxide.


2010 ◽  
Vol 24 (27) ◽  
pp. 5371-5378
Author(s):  
K. Y. CHEONG ◽  
Z. LOCKMAN ◽  
A. AZIZ ◽  
J. H. MOON ◽  
H. J. KIM ◽  
...  

Current conduction mechanisms of atomic-layer deposited Al 2 O 3 (13 nm) stacked on different thermal nitrided SiO 2 thicknesses (2, 4, and 6 nm) on n-type 4 H-SiC have been systematically analyzed. It has been observed that the oxides were thermally stable at the investigated temperature range (25–140°C). By using different conduction process models, such as Schottky emission, direct tunneling, Fowler–Nordheim tunneling, Poole–Frenkel emission, and space-charge limited conduction, which consists of three limited conduction processes, namely, Ohm's law, Child's law, and trap-filled limit, the conduction mechanisms of charge through the oxides have been evaluated. It has been found that the conduction mechanisms were not affected by the investigated temperature range. A relationship plot has been proposed among nitrided SiO 2 thickness, electric field, and conduction mechanisms.


2008 ◽  
Vol 57 (5) ◽  
pp. 3171
Author(s):  
Wang Xin-Juan ◽  
Zhang Jin-Feng ◽  
Zhang Jin-Cheng ◽  
Hao Yue

2020 ◽  
Vol 142 ◽  
pp. 109462 ◽  
Author(s):  
S. Karmakar ◽  
B. Raviteja ◽  
Chetan D. Mistari ◽  
Vanshree Parey ◽  
Ranjit Thapa ◽  
...  

2018 ◽  
Vol 85 ◽  
pp. 98-105 ◽  
Author(s):  
M. Hussein Al-Dharob ◽  
H. Elif Lapa ◽  
A. Kökce ◽  
A. Faruk Özdemir ◽  
D. Ali Aldemir ◽  
...  

2019 ◽  
Vol 35 (4) ◽  
pp. 909-921 ◽  
Author(s):  
Kow-Ming Chang ◽  
Ting-Chia Chang ◽  
Shou-Hsien Chen ◽  
I-Chung Deng

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